Yukihide Shigeno

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Kyoto-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Probe apparatus with optical length-measuring unit and probe testin...
- Patent number 7,221,177
- Issue date May 22, 2007
- Tokyo Electron Limited
- Shigekazu Komatsu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Probe apparatus with optical length-measuring unit and probe testin...
- Publication number 20050253613
- Publication date Nov 17, 2005
- TOKYO ELECTRON LIMITED
- Shigekazu Komatsu
- G01 - MEASURING TESTING