Yukihiko INAGAKI

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate treating apparatus
- Patent number 11,495,476
- Issue date Nov 8, 2022
- SCREEN Holdings Co., Ltd.
- Tatsuhisa Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 11,152,233
- Issue date Oct 19, 2021
- SCREEN Holdings Co., Ltd.
- Yukihiko Inagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 11,101,156
- Issue date Aug 24, 2021
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 10,784,125
- Issue date Sep 22, 2020
- SCREEN Holdings Co., Ltd.
- Yukihiko Inagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treating liquid vaporizing apparatus
- Patent number 10,651,056
- Issue date May 12, 2020
- SCREEN Holdings Co., Ltd.
- Atsushi Tanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treating apparatus
- Patent number 10,573,546
- Issue date Feb 25, 2020
- SCREEN Holdings Co., Ltd.
- Yukihiko Inagaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Peripheral portion processing device and peripheral portion process...
- Patent number 10,286,648
- Issue date May 14, 2019
- SCREEN Holdings Co., Ltd.
- Yukihiko Inagaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate treating apparatus
- Patent number 10,269,598
- Issue date Apr 23, 2019
- SCREEN Holdings Co., Ltd.
- Yukihiko Inagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,201,824
- Issue date Feb 12, 2019
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko Inagaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,112,205
- Issue date Oct 30, 2018
- SCREEN Holdings Co., Ltd.
- Yukihiko Inagaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,047,441
- Issue date Aug 14, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,993,840
- Issue date Jun 12, 2018
- SCREEN Holdings Co., Ltd.
- Yukihiko Inagaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treating apparatus
- Patent number 9,956,565
- Issue date May 1, 2018
- SCREEN Holdings Co., Ltd.
- Yukihiko Inagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,828,676
- Issue date Nov 28, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, storage device, and method of trans...
- Patent number 9,728,434
- Issue date Aug 8, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko Inagaki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,566,598
- Issue date Feb 14, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko Inagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating method and coating apparatus
- Patent number 9,553,007
- Issue date Jan 24, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko Inagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,375,748
- Issue date Jun 28, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko Harumoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating method and coating apparatus
- Patent number 9,343,339
- Issue date May 17, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko Inagaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Exposure device, substrate processing apparatus, method for exposin...
- Patent number 9,152,054
- Issue date Oct 6, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Kazuhiro Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, storage device, and method of trans...
- Patent number 8,827,621
- Issue date Sep 9, 2014
- Sokudo Co., Ltd.
- Yukihiko Inagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing system and ins...
- Patent number 8,477,301
- Issue date Jul 2, 2013
- Sokudo Co., Ltd.
- Masahito Kashiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treating apparatus
- Patent number 6,893,171
- Issue date May 17, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Yoshiteru Fukutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 6,814,507
- Issue date Nov 9, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Yukihiko Inagaki
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus
- Patent number 6,752,543
- Issue date Jun 22, 2004
- Dainippon Screen Mfg. Co. Ltd.
- Yoshiteru Fukutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 6,558,053
- Issue date May 6, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhito Shigemori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cylindrical inner surface scanner and imaging control method in cyl...
- Patent number 5,592,324
- Issue date Jan 7, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Yukihiko Inagaki
- G02 - OPTICS
Information Patent Grant
Light beam scanning system
- Patent number 5,200,849
- Issue date Apr 6, 1993
- Dainippon Screen Mfg. Co., Ltd.
- Yukihiko Inagaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of and apparatus for recording a halftone dot color image on...
- Patent number 4,942,460
- Issue date Jul 17, 1990
- Dainippon Screen Mfg. Co., Ltd.
- Yukihiko Inagaki
- H04 - ELECTRIC COMMUNICATION TECHNIQUE

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20200098602
- Publication date Mar 26, 2020
- SCREEN Holdings Co., Ltd.
- Yukihiko INAGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20200098607
- Publication date Mar 26, 2020
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20190295863
- Publication date Sep 26, 2019
- SCREEN Holdings Co., Ltd.
- Yukihiko INAGAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20190279886
- Publication date Sep 12, 2019
- SCREEN Holdings Co., Ltd.
- Tatsuhisa TSUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20180207652
- Publication date Jul 26, 2018
- SCREEN Holdings Co., Ltd.
- Yukihiko INAGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIPHERAL PORTION PROCESSING DEVICE AND PERIPHERAL PORTION PROCESS...
- Publication number 20180056646
- Publication date Mar 1, 2018
- SCREEN Holdings Co., Ltd.
- Yukihiko INAGAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180044795
- Publication date Feb 15, 2018
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
THERMAL PROCESSING DEVICE, SUBSTRATE PROCESSING APPARATUS AND THERM...
- Publication number 20180021806
- Publication date Jan 25, 2018
- SCREEN Holdings Co., Ltd.
- Yukihiko INAGAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TREATING LIQUID VAPORIZING APPARATUS AND SUBSTRATE TREATING APPARATUS
- Publication number 20170221731
- Publication date Aug 3, 2017
- SCREEN Holdings Co., Ltd.
- Atsushi TANAKA
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20170140962
- Publication date May 18, 2017
- SCREEN Holdings Co., Ltd.
- Yukihiko INAGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170106389
- Publication date Apr 20, 2017
- SCREEN Semiconductor Solutions Co., Ltd.
- Yukihiko INAGAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20170053817
- Publication date Feb 23, 2017
- SCREEN Holdings Co., Ltd.
- Yukihiko INAGAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170050211
- Publication date Feb 23, 2017
- SCREEN Holdings Co., Ltd.
- Yukihiko INAGAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160310979
- Publication date Oct 27, 2016
- SCREEN Holdings Co., Ltd.
- Yukihiko INAGAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160289839
- Publication date Oct 6, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Masahiko HARUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, STORAGE DEVICE, AND METHOD OF TRANS...
- Publication number 20140341681
- Publication date Nov 20, 2014
- Sokudo Co., Ltd.
- Yukihiko INAGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140161983
- Publication date Jun 12, 2014
- Yukihiko INAGAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140022521
- Publication date Jan 23, 2014
- Masahiko HARUMOTO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD FOR EXPOSIN...
- Publication number 20130258299
- Publication date Oct 3, 2013
- Kazuhiro NISHIMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING METHOD AND COATING APPARATUS
- Publication number 20130089664
- Publication date Apr 11, 2013
- Yukihiko INAGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING METHOD AND COATING APPARATUS
- Publication number 20130089668
- Publication date Apr 11, 2013
- Yukihiko INAGAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, STORAGE DEVICE, AND METHOD OF TRANS...
- Publication number 20110222994
- Publication date Sep 15, 2011
- Yukihiko INAGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND INS...
- Publication number 20110063588
- Publication date Mar 17, 2011
- Masahito KASHIYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE EDGE EXPOSURE APPARATUS
- Publication number 20070267582
- Publication date Nov 22, 2007
- Yukihiko Inagaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060024446
- Publication date Feb 2, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20030217695
- Publication date Nov 27, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Yoshiteru Fukutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating apparatus
- Publication number 20030213431
- Publication date Nov 20, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Yoshiteru Fukutomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating apparatus
- Publication number 20030185561
- Publication date Oct 2, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Yukihiko Inagaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus
- Publication number 20020152958
- Publication date Oct 24, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhito Shigemori
- H01 - BASIC ELECTRIC ELEMENTS

Yukihiko INAGAKI

Person

Patents Grantslast 30 patents

Substrate treating apparatus

Substrate treating apparatus and substrate treating method

Substrate treating apparatus

Substrate treating apparatus

Treating liquid vaporizing apparatus

Substrate treating apparatus

Peripheral portion processing device and peripheral portion process...

Substrate treating apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate treating apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, storage device, and method of trans...

Substrate processing apparatus and substrate processing method

Coating method and coating apparatus

Substrate processing apparatus and substrate processing method

Coating method and coating apparatus

Exposure device, substrate processing apparatus, method for exposin...

Substrate processing apparatus, storage device, and method of trans...

Substrate processing apparatus, substrate processing system and ins...

Substrate treating apparatus

Substrate treating apparatus

Substrate processing apparatus

Substrate processing apparatus

Cylindrical inner surface scanner and imaging control method in cyl...

Light beam scanning system

Method of and apparatus for recording a halftone dot color image on...

Patents Applicationslast 30 patents

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

PERIPHERAL PORTION PROCESSING DEVICE AND PERIPHERAL PORTION PROCESS...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

THERMAL PROCESSING DEVICE, SUBSTRATE PROCESSING APPARATUS AND THERM...

TREATING LIQUID VAPORIZING APPARATUS AND SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, STORAGE DEVICE, AND METHOD OF TRANS...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

EXPOSURE DEVICE, SUBSTRATE PROCESSING APPARATUS, METHOD FOR EXPOSIN...

COATING METHOD AND COATING APPARATUS

COATING METHOD AND COATING APPARATUS

SUBSTRATE PROCESSING APPARATUS, STORAGE DEVICE, AND METHOD OF TRANS...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM AND INS...

SUBSTRATE EDGE EXPOSURE APPARATUS

Substrate processing apparatus and substrate processing method

Substrate processing apparatus

Substrate treating apparatus

Substrate treating apparatus

Substrate processing apparatus