Yukihiko Sakata

Follow

Person

Tosu-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate dual-side processing apparatus
- Patent number 6,874,515
- Issue date Apr 5, 2005
- Tokyo Electron Limited
- Akira Ishihara
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Substrate dual-side processing apparatus
- Publication number 20020157692
- Publication date Oct 31, 2002
- Akira Ishihara
- G02 - OPTICS