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Yukihiro Kobayashi
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Odawara-shi, JP
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last 30 patents
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Patent Grant
Sputtering apparatus
Patent number
8,147,664
Issue date
Apr 3, 2012
Canon Anelva Corporation
Nobuo Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SPUTTERING APPARATUS
Publication number
20100243438
Publication date
Sep 30, 2010
Canon ANELVA Corporation
Nobuo Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING APPARATUS
Publication number
20090166195
Publication date
Jul 2, 2009
Canon ANELVA Corporation
Yukihiro Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...