Yukihiro Morimoto

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Himeji-city, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for separating bonded bodies using excimer light irradiation
- Patent number 8,845,858
- Issue date Sep 30, 2014
- Denki Kagaku Kogyo Kabushiki Kaisha
- Yoshitsugu Goto
- B32 - LAYERED PRODUCTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR SEPARATING BONDED BODIES USING EXCIMER LIGHT IRRADIATION
- Publication number 20130092326
- Publication date Apr 18, 2013
- DENKI KAGAKU KOGYO KABUSHIKI KAISHA
- Yoshitsugu Goto
- B32 - LAYERED PRODUCTS