Yukihiro Shibata

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Defect inspection apparatus and pattern chip
- Patent number 10,955,361
- Issue date Mar 23, 2021
- HITACHI HIGH-TECH CORPORATION
- Yuta Urano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection device, pattern chip, and defect inspection method
- Patent number 10,948,424
- Issue date Mar 16, 2021
- HITACHI HIGH-TECH CORPORATION
- Yuta Urano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection method and its device
- Patent number 9,976,966
- Issue date May 22, 2018
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and device using same
- Patent number 9,606,071
- Issue date Mar 28, 2017
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Defect inspection device and defect inspection method
- Patent number 9,523,648
- Issue date Dec 20, 2016
- Hitachi High-Technologies Corporation
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and its device
- Patent number 9,513,228
- Issue date Dec 6, 2016
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Defect inspection method and defect inspection device
- Patent number 9,470,640
- Issue date Oct 18, 2016
- Hitachi High-Technologies Corporation
- Shunichi Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and device using same
- Patent number 9,329,137
- Issue date May 3, 2016
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and defect inspection device
- Patent number 9,310,318
- Issue date Apr 12, 2016
- Hitachi High-Technologies Corporation
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and defect inspection device
- Patent number 9,291,574
- Issue date Mar 22, 2016
- Hitachi High-Technologies Corporation
- Shunichi Matsumoto
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and device thereof
- Patent number 9,255,793
- Issue date Feb 9, 2016
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and device therefor
- Patent number 9,239,283
- Issue date Jan 19, 2016
- Hitachi High-Technologies Corporation
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Grant
Optical filtering device, defect inspection method and apparatus th...
- Patent number 9,182,592
- Issue date Nov 10, 2015
- Hitachi, Ltd.
- Taketo Ueno
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting apparatus and defect inspecting method
- Patent number 8,970,836
- Issue date Mar 3, 2015
- Hitachi High-Technologies Corporation
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and device using same
- Patent number 8,958,062
- Issue date Feb 17, 2015
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and defect inspection apparatus
- Patent number 8,922,764
- Issue date Dec 30, 2014
- Hitachi High-Technologies Corporation
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and apparatus therefor
- Patent number 8,885,037
- Issue date Nov 11, 2014
- Hitachi High-Technologies Corporation
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspecting apparatus and defect inspecting method
- Patent number 8,830,465
- Issue date Sep 9, 2014
- Hitachi High-Technologies Corporation
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method of defect inspection and device of defect inspection
- Patent number 8,804,112
- Issue date Aug 12, 2014
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Fault inspection device and fault inspection method
- Patent number 8,804,110
- Issue date Aug 12, 2014
- Hitachi High-Technologies Corporation
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and device therefor
- Patent number 8,711,347
- Issue date Apr 29, 2014
- Hitachi High-Technologies Corporation
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Grant
Dark-field defect inspecting method, dark-field defect inspecting a...
- Patent number 8,681,328
- Issue date Mar 25, 2014
- Hitachi High-Technologies Corporation
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and device for inspecting for defects
- Patent number 8,670,116
- Issue date Mar 11, 2014
- Hitachi High-Technologies Corporation
- Toshiyuki Nakao
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Cleaning method and method for manufacturing electronic device
- Patent number 8,454,754
- Issue date Jun 4, 2013
- Shibaura Mechatronics Corporation
- Yukihiro Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection apparatus and method
- Patent number 8,416,292
- Issue date Apr 9, 2013
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting defects
- Patent number 8,416,402
- Issue date Apr 9, 2013
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Cleaning system and cleaning method
- Patent number 8,303,797
- Issue date Nov 6, 2012
- Kabushiki Kaisha Toshiba
- Naoya Hayamizu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus for electrolyzing sulfuric acid, method of performing ele...
- Patent number 8,236,161
- Issue date Aug 7, 2012
- Shibaura Mechatronics Corporation
- Nobuo Kobayashi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus for inspecting defects
- Patent number 8,228,494
- Issue date Jul 24, 2012
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting defects
- Patent number 8,203,706
- Issue date Jun 19, 2012
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEFECT INSPECTION APPARATUS AND PATTERN CHIP
- Publication number 20200182804
- Publication date Jun 11, 2020
- Hitachi High-Technologies Corporation
- Yuta URANO
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION DEVICE, PATTERN CHIP, AND DEFECT INSPECTION METHOD
- Publication number 20190107498
- Publication date Apr 11, 2019
- Hitachi High-Technologies Corporation
- Yuta URANO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTION METHOD AND ITS DEVICE
- Publication number 20170102338
- Publication date Apr 13, 2017
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEVICE USING SAME
- Publication number 20160305893
- Publication date Oct 20, 2016
- Hitachi High-Technologies Corporation
- Yukihiro SHIBATA
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE
- Publication number 20160161422
- Publication date Jun 9, 2016
- Hitachi High-Technologies Corporation
- Shunichi MATSUMOTO
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEVICE USING SAME
- Publication number 20160011123
- Publication date Jan 14, 2016
- Hitachi High-Technologies Corporation
- Yukihiro SHIBATA
- G01 - MEASURING TESTING
Information Patent Application
Defect Inspection Method and Defect Inspection Device
- Publication number 20150276623
- Publication date Oct 1, 2015
- Hitachi High-Technologies Corporation
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Application
Defect Inspection Device and Defect Inspection Method
- Publication number 20150241361
- Publication date Aug 27, 2015
- Hitachi High-Technologies Corporation
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND ITS DEVICE
- Publication number 20150022806
- Publication date Jan 22, 2015
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE
- Publication number 20140268122
- Publication date Sep 18, 2014
- Hitachi High-Technologies Corporation
- Shunichi Matsumoto
- G01 - MEASURING TESTING
Information Patent Application
Defect Inspecting Apparatus and Defect Inspecting Method
- Publication number 20140233024
- Publication date Aug 21, 2014
- Hitachi High-Techmologies Corporation
- Atsushi Taniguchi
- G02 - OPTICS
Information Patent Application
Optical Filtering Device, Defect Inspection Method and Apparatus Th...
- Publication number 20140160471
- Publication date Jun 12, 2014
- Taketo Ueno
- G02 - OPTICS
Information Patent Application
DEFECT INSPECTION METHOD AND DEVICE USING SAME
- Publication number 20140009755
- Publication date Jan 9, 2014
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS
- Publication number 20130301042
- Publication date Nov 14, 2013
- Hitachi High-Technologies Corporation
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Application
DEFECT TESTING METHOD AND DEVICE FOR DEFECT TESTING
- Publication number 20130293880
- Publication date Nov 7, 2013
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEVICE THEREFOR
- Publication number 20130293879
- Publication date Nov 7, 2013
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTING APPARATUS AND DEFECT INSPECTING METHOD
- Publication number 20130188184
- Publication date Jul 25, 2013
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR INSPECTING FOR DEFECTS
- Publication number 20130155400
- Publication date Jun 20, 2013
- Toshiyuki Nakao
- B82 - NANO-TECHNOLOGY
Information Patent Application
FAULT INSPECTION DEVICE AND FAULT INSPECTION METHOD
- Publication number 20130141715
- Publication date Jun 6, 2013
- Yuta Urano
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEVICE THEREFOR
- Publication number 20130114078
- Publication date May 9, 2013
- Toshifumi Honda
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEVICE THEREOF
- Publication number 20120296576
- Publication date Nov 22, 2012
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING DEFECTS
- Publication number 20120236296
- Publication date Sep 20, 2012
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND APPARATUS
- Publication number 20120128230
- Publication date May 24, 2012
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF DEFECT INSPECTION AND DEVICE OF DEFECT INSPECTION
- Publication number 20120092657
- Publication date Apr 19, 2012
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND APPARATUS THEREFOR
- Publication number 20120092484
- Publication date Apr 19, 2012
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS
- Publication number 20120019816
- Publication date Jan 26, 2012
- Hitachi High-Technologies Corporation
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
Apparatus For Inspecting Defects
- Publication number 20110292390
- Publication date Dec 1, 2011
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
DARK-FIELD DEFECT INSPECTING METHOD, DARK-FIELD DEFECT INSPECTING A...
- Publication number 20110286001
- Publication date Nov 24, 2011
- Atsushi Taniguchi
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND APPARATUS
- Publication number 20110170765
- Publication date Jul 14, 2011
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Inspection Method and System
- Publication number 20110075134
- Publication date Mar 31, 2011
- Sachio Uto
- G01 - MEASURING TESTING

Yukihiro Shibata

Person

Patents Grantslast 30 patents

Defect inspection apparatus and pattern chip

Defect inspection device, pattern chip, and defect inspection method

Defect inspection method and its device

Defect inspection method and device using same

Defect inspection device and defect inspection method

Defect inspection method and its device

Defect inspection method and defect inspection device

Defect inspection method and device using same

Defect inspection method and defect inspection device

Defect inspection method and defect inspection device

Defect inspection method and device thereof

Defect inspection method and device therefor

Optical filtering device, defect inspection method and apparatus th...

Defect inspecting apparatus and defect inspecting method

Defect inspection method and device using same

Defect inspection method and defect inspection apparatus

Defect inspection method and apparatus therefor

Defect inspecting apparatus and defect inspecting method

Method of defect inspection and device of defect inspection

Fault inspection device and fault inspection method

Defect inspection method and device therefor

Dark-field defect inspecting method, dark-field defect inspecting a...

Method and device for inspecting for defects

Cleaning method and method for manufacturing electronic device

Defect inspection apparatus and method

Method and apparatus for inspecting defects

Cleaning system and cleaning method

Apparatus for electrolyzing sulfuric acid, method of performing ele...

Apparatus for inspecting defects

Method and apparatus for inspecting defects

Patents Applicationslast 30 patents

DEFECT INSPECTION APPARATUS AND PATTERN CHIP

DEFECT INSPECTION DEVICE, PATTERN CHIP, AND DEFECT INSPECTION METHOD

DEFECT INSPECTION METHOD AND ITS DEVICE

DEFECT INSPECTION METHOD AND DEVICE USING SAME

DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE

DEFECT INSPECTION METHOD AND DEVICE USING SAME

Defect Inspection Method and Defect Inspection Device

Defect Inspection Device and Defect Inspection Method

DEFECT INSPECTION METHOD AND ITS DEVICE

DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE

Defect Inspecting Apparatus and Defect Inspecting Method

Optical Filtering Device, Defect Inspection Method and Apparatus Th...

DEFECT INSPECTION METHOD AND DEVICE USING SAME

DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS

DEFECT TESTING METHOD AND DEVICE FOR DEFECT TESTING

DEFECT INSPECTION METHOD AND DEVICE THEREFOR

DEFECT INSPECTING APPARATUS AND DEFECT INSPECTING METHOD

METHOD AND DEVICE FOR INSPECTING FOR DEFECTS

FAULT INSPECTION DEVICE AND FAULT INSPECTION METHOD

DEFECT INSPECTION METHOD AND DEVICE THEREFOR

DEFECT INSPECTION METHOD AND DEVICE THEREOF

METHOD AND APPARATUS FOR INSPECTING DEFECTS

DEFECT INSPECTION METHOD AND APPARATUS

METHOD OF DEFECT INSPECTION AND DEVICE OF DEFECT INSPECTION

DEFECT INSPECTION METHOD AND APPARATUS THEREFOR

DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS

Apparatus For Inspecting Defects

DARK-FIELD DEFECT INSPECTING METHOD, DARK-FIELD DEFECT INSPECTING A...

DEFECT INSPECTION METHOD AND APPARATUS

Defect Inspection Method and System