Yukihiro Yokota

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Lamp device, exposure apparatus, and method of manufacturing article
- Patent number 11,521,845
- Issue date Dec 6, 2022
- Canon Kabushiki Kaisha
- Hideki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mark position measuring method and apparatus
- Patent number 7,453,570
- Issue date Nov 18, 2008
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mark position measuring method and apparatus
- Patent number 7,310,146
- Issue date Dec 18, 2007
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle chuck in exposure apparatus and semiconductor device manufa...
- Patent number 6,604,011
- Issue date Aug 5, 2003
- Canon Kabushiki Kaisha
- Yukihiro Yokota
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LAMP DEVICE, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20210082682
- Publication date Mar 18, 2021
- Canon Kabushiki Kaisha
- Hideki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MARK POSITION MEASURING METHOD AND APPARATUS
- Publication number 20080030733
- Publication date Feb 7, 2008
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mark position measuring method and apparatus
- Publication number 20050030537
- Publication date Feb 10, 2005
- Canon Kabushiki Kaisha
- Nozomu Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reticle chuck in exposure apparatus and semiconductor device manufa...
- Publication number 20020013069
- Publication date Jan 31, 2002
- Yukihiro Yokota
- H01 - BASIC ELECTRIC ELEMENTS