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Yukihisa Mohara
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Kamisato, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Inspection apparatus and inspection method
Patent number
10,458,924
Issue date
Oct 29, 2019
Hitachi High-Technologies Corporation
Hisaaki Kanai
G01 - MEASURING TESTING
Information
Patent Grant
Optical type inspection apparatus, inspection system and the wafer...
Patent number
9,097,686
Issue date
Aug 4, 2015
Hitachi High-Technologies Corporation
Yoshio Bamba
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus and inspection method
Patent number
8,525,984
Issue date
Sep 3, 2013
Hitachi High-Technologies Corporation
Hiroyuki Yamashita
G01 - MEASURING TESTING
Information
Patent Grant
Method of apparatus for detecting particles on a specimen
Patent number
8,289,507
Issue date
Oct 16, 2012
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus and inspection method
Patent number
7,999,932
Issue date
Aug 16, 2011
Hitachi High-Technologies Corporation
Hiroyuki Yamashita
G01 - MEASURING TESTING
Information
Patent Grant
Method of apparatus for detecting particles on a specimen
Patent number
7,952,700
Issue date
May 31, 2011
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Method of apparatus for detecting particles on a specimen
Patent number
7,817,261
Issue date
Oct 19, 2010
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus and inspection method
Patent number
7,733,473
Issue date
Jun 8, 2010
Hitachi High-Technologies Corporation
Hiroyuki Yamashita
G01 - MEASURING TESTING
Information
Patent Grant
Method of apparatus for detecting particles on a specimen
Patent number
7,369,223
Issue date
May 6, 2008
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Defect Inspection Device
Publication number
20240027361
Publication date
Jan 25, 2024
Hitachi High-Tech Corporation
Kazuhide SATO
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20190178813
Publication date
Jun 13, 2019
Hitachi High-Technologies Corporation
Hisaaki KANAI
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL TYPE INSPECTION APPARATUS, INSPECTION SYSTEM AND THE WAFER...
Publication number
20140192352
Publication date
Jul 10, 2014
Hitachi High-Technologies Corporation
Yoshio Bamba
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS
Publication number
20130194579
Publication date
Aug 1, 2013
Yukihisa Mohara
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20120224173
Publication date
Sep 6, 2012
Hitachi High-Technologies Corporation
Hiroyuki YAMASHITA
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20110285989
Publication date
Nov 24, 2011
Hitachi High-Technologies Corporation
Hiroyuki YAMASHITA
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN
Publication number
20110228258
Publication date
Sep 22, 2011
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN
Publication number
20110032515
Publication date
Feb 10, 2011
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20100208251
Publication date
Aug 19, 2010
Hitachi High-Technologies Corporation
Hiroyuki YAMASHITA
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20080239319
Publication date
Oct 2, 2008
Hiroyuki YAMASHITA
G01 - MEASURING TESTING
Information
Patent Application
Method Of Apparatus For Detecting Particles On A Specimen
Publication number
20080204724
Publication date
Aug 28, 2008
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Application
Method of apparatus for detecting particles on a specimen
Publication number
20050213086
Publication date
Sep 29, 2005
Akira Hamamatsu
G01 - MEASURING TESTING