Yukihisa WADA

Person

Kawasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Ruthenium-etching solution, method for manufacturing ruthenium-etch...
- Patent number 11,898,081
- Issue date Feb 13, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Takuya Ohhashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing ruthenium wiring
- Patent number 11,686,002
- Issue date Jun 27, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching solution and method for manufacturing semiconductor element
- Patent number 11,518,937
- Issue date Dec 6, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching solution, and method of producing semiconductor element
- Patent number 11,120,994
- Issue date Sep 14, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa Wada
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Patents Applicationslast 30 patents

Information Patent Application
RINSING SOLUTION, METHOD OF TREATING SUBSTRATE, AND METHOD OF MANUF...
- Publication number 20230265362
- Publication date Aug 24, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa WADA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
CLEANING LIQUID AND METHOD FOR CLEANING SUBSTRATE
- Publication number 20230203408
- Publication date Jun 29, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa WADA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
CLEANING LIQUID AND METHOD FOR CLEANING SUBSTRATE
- Publication number 20230203409
- Publication date Jun 29, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa WADA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
CHEMICAL SOLUTION USED FOR CLEANING OR ETCHING RUTHENIUM-CONTAINING...
- Publication number 20220243127
- Publication date Aug 4, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa WADA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
METHOD FOR PRODUCING SEMICONDUCTOR ELEMENT AND CHEMICAL SOLUTION TO...
- Publication number 20220205111
- Publication date Jun 30, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING AQUEOUS SOLUTION OF PURIFIED ORTHOPERIODIC ACI...
- Publication number 20220194791
- Publication date Jun 23, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Hiroshi ITO
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD FOR MANUFACTURING RUTHENIUM WIRING
- Publication number 20220049361
- Publication date Feb 17, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa WADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING SOLUTION AND METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT
- Publication number 20210198572
- Publication date Jul 1, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RUTHENIUM-ETCHING SOLUTION, METHOD FOR MANUFACTURING RUTHENIUM-ETCH...
- Publication number 20210155851
- Publication date May 27, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Takuya OHHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING SOLUTION, AND METHOD OF PRODUCING SEMICONDUCTOR ELEMENT
- Publication number 20200211856
- Publication date Jul 2, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Yukihisa WADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING SOLUTION, METHOD FOR PROCESSING OBJECT TO BE PROCESSED, AND...
- Publication number 20200190672
- Publication date Jun 18, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Takuya OHHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yukihisa WADA

Person

Patents Grantslast 30 patents

Ruthenium-etching solution, method for manufacturing ruthenium-etch...

Method for manufacturing ruthenium wiring

Etching solution and method for manufacturing semiconductor element

Etching solution, and method of producing semiconductor element

Patents Applicationslast 30 patents

RINSING SOLUTION, METHOD OF TREATING SUBSTRATE, AND METHOD OF MANUF...

CLEANING LIQUID AND METHOD FOR CLEANING SUBSTRATE

CLEANING LIQUID AND METHOD FOR CLEANING SUBSTRATE

CHEMICAL SOLUTION USED FOR CLEANING OR ETCHING RUTHENIUM-CONTAINING...

METHOD FOR PRODUCING SEMICONDUCTOR ELEMENT AND CHEMICAL SOLUTION TO...

METHOD FOR PRODUCING AQUEOUS SOLUTION OF PURIFIED ORTHOPERIODIC ACI...

METHOD FOR MANUFACTURING RUTHENIUM WIRING

ETCHING SOLUTION AND METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT

RUTHENIUM-ETCHING SOLUTION, METHOD FOR MANUFACTURING RUTHENIUM-ETCH...

ETCHING SOLUTION, AND METHOD OF PRODUCING SEMICONDUCTOR ELEMENT

ETCHING SOLUTION, METHOD FOR PROCESSING OBJECT TO BE PROCESSED, AND...