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Yukihito Tashiro

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Patents Grantslast 30 patents

  • Information Patent Grant

    Vacuum processing apparatus
    • Patent number 11,891,685
    • Issue date Feb 6, 2024
    • ULVAC, Inc.
    • Yukihito Tashiro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus
    • Patent number 11,549,173
    • Issue date Jan 10, 2023
    • ULVAC, Inc.
    • Koji Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus and method of forming film
    • Patent number 11,056,323
    • Issue date Jul 6, 2021
    • ULVAC, Inc.
    • Shinya Nakamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Cathode unit for sputtering apparatus
    • Patent number 10,844,474
    • Issue date Nov 24, 2020
    • ULVAC, Inc.
    • Shinya Nakamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Holding apparatus
    • Patent number 10,763,153
    • Issue date Sep 1, 2020
    • ULVAC, Inc.
    • Yukihito Tashiro
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Articulated robot, and conveying device
    • Patent number 9,561,586
    • Issue date Feb 7, 2017
    • Ulvac, Inc.
    • Yukihito Tashiro
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 9,355,878
    • Issue date May 31, 2016
    • TDK Corporation
    • Einstein Noel Abarra
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate transport apparatus, and system and method for manufactur...
    • Patent number 9,346,171
    • Issue date May 24, 2016
    • Canon Anelva Corporation
    • Kazuhito Watanabe
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 9,245,785
    • Issue date Jan 26, 2016
    • Canon Anelva Corporation
    • Yukihito Tashiro
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum actuator including a stator forming a part of a vacuum parti...
    • Patent number 8,912,697
    • Issue date Dec 16, 2014
    • Canon Anelva Corporation
    • Kazuhito Watanabe
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

  • Information Patent Application

    Vacuum Processing Apparatus
    • Publication number 20220154324
    • Publication date May 19, 2022
    • Ulvac, Inc.
    • Yukihito Tashiro
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20220145445
    • Publication date May 12, 2022
    • Ulvac, Inc.
    • Koji Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Sputtering Apparatus and Method of Forming Film
    • Publication number 20200080192
    • Publication date Mar 12, 2020
    • Ulvac, Inc.
    • Shinya Nakamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Cathode Unit for Sputtering Apparatus
    • Publication number 20190194798
    • Publication date Jun 27, 2019
    • Ulvac, Inc.
    • Shinya Nakamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HOLDING APPARATUS
    • Publication number 20190103301
    • Publication date Apr 4, 2019
    • Ulvac, Inc.
    • Yukihito Tashiro
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ARTICULATED ROBOT, AND CONVEYING DEVICE
    • Publication number 20150343630
    • Publication date Dec 3, 2015
    • ULVAC, Inc.
    • Yukihito TASHIRO
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20140105709
    • Publication date Apr 17, 2014
    • iZA CORPORATION
    • Einstein Noel ABARRA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE TRANSPORT APPARATUS, AND SYSTEM AND METHOD FOR MANUFACTUR...
    • Publication number 20130202398
    • Publication date Aug 8, 2013
    • CANON ANELVA CORPOREATION
    • Kazuhito Watanabe
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20120148375
    • Publication date Jun 14, 2012
    • CANON ANELVA CORPORATON
    • Yukihito Tashiro
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE CONVEYANCE APPARATUS, ELECTRONIC DEVICE MANUFACTURING SYS...
    • Publication number 20120014770
    • Publication date Jan 19, 2012
    • Canon ANELVA Corporation
    • Kazuhito Watanabe
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    VACUUM ACTUATOR AND SUBSTRATE TRANSPORT ROBOT
    • Publication number 20110156514
    • Publication date Jun 30, 2011
    • Canon ANELVA Corporation
    • Kazuhito WATANABE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Vacuum Processing Apparatus, Method for Manufacturing Semiconductor...
    • Publication number 20080171435
    • Publication date Jul 17, 2008
    • Canon ANELVA Corporation
    • Takahiro Fujii
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTICHAMBER SUBSTRATE PROCESSING APPARATUS
    • Publication number 20010052392
    • Publication date Dec 20, 2001
    • MASAHIKO NAKAMURA
    • H01 - BASIC ELECTRIC ELEMENTS