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Yukiko Nishioka
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Kanagawa-ken, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for processing substrate
Patent number
7,285,492
Issue date
Oct 23, 2007
Ebara Corporation
Xinming Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning apparatus and cleaning method
Patent number
7,264,681
Issue date
Sep 4, 2007
Ebara Corporation
Ryosuke Yonekura
B08 - CLEANING
Information
Patent Grant
Cleaning evaluation method for a substrate
Patent number
7,155,963
Issue date
Jan 2, 2007
Ebara Corporation
Yukiko Nishioka
B08 - CLEANING
Information
Patent Grant
Method and apparatus for polishing a workpiece
Patent number
7,077,730
Issue date
Jul 18, 2006
Ebara Corporation
Tatsuya Kohama
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
Publication number
20100105154
Publication date
Apr 29, 2010
Xinming Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Cleaning apparatus and cleaning method
Publication number
20080000509
Publication date
Jan 3, 2008
Ryosuke Yonekura
B08 - CLEANING
Information
Patent Application
Method and apparatus for processing substrate
Publication number
20080000776
Publication date
Jan 3, 2008
Xinming Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for processing substrate
Publication number
20050245080
Publication date
Nov 3, 2005
Xinming Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Cleaning evaluation method for a substrate
Publication number
20050050946
Publication date
Mar 10, 2005
Yukiko Nishioka
B08 - CLEANING
Information
Patent Application
Method and apparatus for polishing a workpiece
Publication number
20050020194
Publication date
Jan 27, 2005
Tatsuya Kohama
B24 - GRINDING POLISHING
Information
Patent Application
Cleaning apparatus and cleaning method
Publication number
20040065352
Publication date
Apr 8, 2004
Ryosuke Yonekura
B08 - CLEANING