Yukinao KAGA

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, non-transitory comput...
- Patent number 12,000,045
- Issue date Jun 4, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and recording medium
- Patent number 11,876,010
- Issue date Jan 16, 2024
- Kokusai Electric Corporation
- Tadashi Okazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,854,850
- Issue date Dec 26, 2023
- Kokusai Electric Corporation
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate holder and mounting tool
- Patent number 11,031,270
- Issue date Jun 8, 2021
- Kokusai Electric Corporation
- Atsushi Hirano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device, non-transitory compu...
- Patent number 11,004,676
- Issue date May 11, 2021
- Kokusai Electric Corporation
- Arito Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,640,869
- Issue date May 5, 2020
- Kokusai Electric Corporation
- Kazuyuki Okuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,622,213
- Issue date Apr 14, 2020
- Kokusai Electric Corporation
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of loading sub...
- Patent number 10,559,485
- Issue date Feb 11, 2020
- Kokusai Electric Corporation
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 10,388,530
- Issue date Aug 20, 2019
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,366,894
- Issue date Jul 30, 2019
- Kokusai Electric Corporation
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,972,500
- Issue date May 15, 2018
- Hitachi Kokusai Electric, Inc.
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming metal-containing film
- Patent number 9,650,715
- Issue date May 16, 2017
- Hitachi Kokusai Electric Inc.
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 9,508,555
- Issue date Nov 29, 2016
- Hitachi Kokusai Electric, Inc.
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,472,398
- Issue date Oct 18, 2016
- Hitachi Kokusai Electric Inc.
- Tatsuyuki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 9,466,477
- Issue date Oct 11, 2016
- Hitachi Kokusai Electric Inc.
- Tatsuyuki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and substrate processing...
- Patent number 9,416,446
- Issue date Aug 16, 2016
- Hitachi Kokusai Electric Inc.
- Tatsuyuki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and substrate processing...
- Patent number 9,340,873
- Issue date May 17, 2016
- Hitachi Kokusai Electric Inc.
- Tatsuyuki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction tube, substrate processing apparatus and method of manufac...
- Patent number 9,263,269
- Issue date Feb 16, 2016
- Hitachi Kokusai Electric Inc.
- Satoshi Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, cleaning method, and...
- Patent number 9,238,257
- Issue date Jan 19, 2016
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming metal-containing film
- Patent number 9,045,825
- Issue date Jun 2, 2015
- Hitachi Kokusai Electric Inc.
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,808,455
- Issue date Aug 19, 2014
- Hitachi Kokusai Electric Inc.
- Tatsuyuki Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 8,691,708
- Issue date Apr 8, 2014
- Hitachi Kokusai Electric Inc.
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 8,410,001
- Issue date Apr 2, 2013
- Hitachi Kokusai Electric Inc.
- Yushin Takasawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUT...
- Publication number 20240279807
- Publication date Aug 22, 2024
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240229229
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Koei KURIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240133026
- Publication date Apr 25, 2024
- Koei KURIBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device, Non-transitory Comput...
- Publication number 20210395891
- Publication date Dec 23, 2021
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200411330
- Publication date Dec 31, 2020
- Kokusai Electric Corporation
- Ryosuke YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
- Publication number 20200219745
- Publication date Jul 9, 2020
- Kokusai Electric Corporation
- Tadashi OKAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20200144082
- Publication date May 7, 2020
- Kokusai Electric Corporation
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20200135506
- Publication date Apr 30, 2020
- Kokusai Electric Corporation
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20190157089
- Publication date May 23, 2019
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20190093224
- Publication date Mar 28, 2019
- Kokusai Electric Corporation
- Ryosuke YOSHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20190093222
- Publication date Mar 28, 2019
- Kokusai Electric Corporation
- Kazuyuki OKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPU...
- Publication number 20190096663
- Publication date Mar 28, 2019
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER AND MOUNTING TOOL
- Publication number 20180374734
- Publication date Dec 27, 2018
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device, Method of Loading Sub...
- Publication number 20180350638
- Publication date Dec 6, 2018
- Kokusai Electric Corporation
- Yukinao KAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20180247819
- Publication date Aug 30, 2018
- Hitachi Kokusai Electric Inc.
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20170287716
- Publication date Oct 5, 2017
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20170047227
- Publication date Feb 16, 2017
- Hitachi Kokusai Electric Inc.
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160196978
- Publication date Jul 7, 2016
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
- Publication number 20160024649
- Publication date Jan 28, 2016
- Hitachi Kokusai Electric Inc.
- Tatsuyuki SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20150325447
- Publication date Nov 12, 2015
- Hitachi Kokusai Electric Inc.
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20150262816
- Publication date Sep 17, 2015
- Hitachi Kokusai Electric, Inc.
- Tatsuyuki SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING METAL-CONTAINING FILM
- Publication number 20150225852
- Publication date Aug 13, 2015
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device Manufacturing Method and Substrate Processing...
- Publication number 20150214045
- Publication date Jul 30, 2015
- Hitachi Kokusai Electric Inc.
- Tatsuyuki SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20140295667
- Publication date Oct 2, 2014
- Hitachi Kokusai Electric Inc.
- Yukinao Kaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20140162454
- Publication date Jun 12, 2014
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...
- Publication number 20140080317
- Publication date Mar 20, 2014
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reaction Tube, Substrate Processing Apparatus and Method of Manufac...
- Publication number 20140073146
- Publication date Mar 13, 2014
- Hitachi Kokusai Electric Inc.
- Satoshi OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
- Publication number 20130095668
- Publication date Apr 18, 2013
- Hitachi Kokusai Electric Inc.
- Tatsuyuki SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...
- Publication number 20120214300
- Publication date Aug 23, 2012
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
- Publication number 20120108077
- Publication date May 3, 2012
- Hitachi Kokusai Electric Inc.
- Yukinao KAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Yukinao KAGA

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, non-transitory comput...

Substrate processing apparatus and recording medium

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, substrate holder and mounting tool

Method for manufacturing semiconductor device, non-transitory compu...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device, method of loading sub...

Method of manufacturing semiconductor device and substrate processi...

Method of manufacturing semiconductor device, substrate processing...

Method of manufacturing semiconductor device

Method of forming metal-containing film

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device and substrate processi...

Method of manufacturing semiconductor device, substrate processing...

Semiconductor device manufacturing method and substrate processing...

Semiconductor device manufacturing method and substrate processing...

Reaction tube, substrate processing apparatus and method of manufac...

Method of manufacturing semiconductor device, cleaning method, and...

Method of forming metal-containing film

Substrate processing apparatus and method of manufacturing semicond...

Method of manufacturing semiconductor device and substrate processi...

Method of manufacturing semiconductor device, method of processing...

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUT...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

Method of Manufacturing Semiconductor Device, Non-transitory Comput...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPU...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER AND MOUNTING TOOL

Method of Manufacturing Semiconductor Device, Method of Loading Sub...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Method of Manufacturing Semiconductor Device

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

METHOD OF FORMING METAL-CONTAINING FILM

Semiconductor Device Manufacturing Method and Substrate Processing...

Method of Manufacturing Semiconductor Device

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

MEHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...

Reaction Tube, Substrate Processing Apparatus and Method of Manufac...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...