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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,798,821
Issue date
Oct 24, 2023
Tokyo Electron Limited
Yukinobu Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment apparatus and heat treatment method
Patent number
11,393,702
Issue date
Jul 19, 2022
Tokyo Electron Limited
Shinsuke Takaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate heating device
Patent number
11,049,738
Issue date
Jun 29, 2021
Tokyo Electron Limited
Hibiki Otani
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20240030049
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Yukinobu OTSUKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20210118707
Publication date
Apr 22, 2021
TOKYO ELECTRON LIMITED
Yukinobu OTSUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
Publication number
20210005468
Publication date
Jan 7, 2021
TOKYO ELECTRON LIMITED
Shinsuke TAKAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HEATING DEVICE
Publication number
20180308723
Publication date
Oct 25, 2018
TOKYO ELECTRON LIMITED
Hibiki OTANI
H01 - BASIC ELECTRIC ELEMENTS