Yukinori ABURATANI

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,131,902
- Issue date Oct 29, 2024
- Kokusai Electric Corporation
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,891,697
- Issue date Feb 6, 2024
- Kokusai Electric Corporation
- Naofumi Ohashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,521,848
- Issue date Dec 6, 2022
- Kokusai Electric Corporation
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and temperature measurement unit
- Patent number 11,424,146
- Issue date Aug 23, 2022
- Kokusai Electric Corporation
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,289,350
- Issue date Mar 29, 2022
- Kokusai Electric Corporation
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,453,720
- Issue date Oct 22, 2019
- Kokusai Electric Corporation
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 10,403,478
- Issue date Sep 3, 2019
- Kokusai Electric Corporation
- Hidehiro Yanai
- B08 - CLEANING
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 10,014,171
- Issue date Jul 3, 2018
- Hiatchi Kokusai Electric, Inc.
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 9,082,797
- Issue date Jul 14, 2015
- Hitachi Kokusai Electric, Inc.
- Yukinori Aburatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 8,876,453
- Issue date Nov 4, 2014
- Hitachi Kokusai Electric Inc.
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and semiconductor device manufacturi...
- Patent number 8,814,488
- Issue date Aug 26, 2014
- Hitachi Kokusai Electric Inc.
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 8,420,167
- Issue date Apr 16, 2013
- Hitachi Kokusai Electric Inc.
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and manufacturing method of a semico...
- Patent number 8,277,161
- Issue date Oct 2, 2012
- Hitachi Kokusai Electric Inc.
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and manufacturing method for semicon...
- Patent number 8,128,333
- Issue date Mar 6, 2012
- Hitachi Kokusai Electric Inc.
- Yukinori Aburatani
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Semiconductor manufacturing equipment
- Patent number D652395
- Issue date Jan 17, 2012
- Hitachi Kokusai Electric Inc.
- Masakazu Shimada
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Semiconductor manufacturing equipment
- Patent number D651990
- Issue date Jan 10, 2012
- Hitachi Kokusai Electric Inc.
- Masakazu Shimada
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate processing apparatus having gas side flow via gas inlet
- Patent number 7,700,054
- Issue date Apr 20, 2010
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Treatment object conveyor apparatus, semiconductor manufacturing ap...
- Patent number 6,190,104
- Issue date Feb 20, 2001
- Kokusai Electric Co., Ltd.
- Kazuhito Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transferring mechanism
- Patent number 6,143,083
- Issue date Nov 7, 2000
- Kokusai Electric Co., Ltd.
- Shuji Yonemitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus with a processing chamber, transfer...
- Patent number 6,066,210
- Issue date May 23, 2000
- Kokusai Electric Co., Ltd.
- Shuji Yonemitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 5,788,447
- Issue date Aug 4, 1998
- Kokusai Electric Co., Ltd.
- Shuji Yonemitsu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250022703
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING VESSEL, AND METHOD OF MA...
- Publication number 20250011925
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Motomu DEGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method, Method...
- Publication number 20250011930
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Kentaro GOSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPOR...
- Publication number 20240249963
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, GAS SUPPLY METHOD, SU...
- Publication number 20240177991
- Publication date May 30, 2024
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PLASMA GENERATION APPARATUS, METHOD...
- Publication number 20240096604
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAINTENANCE METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, N...
- Publication number 20230317438
- Publication date Oct 5, 2023
- Kokusai Electric Corporation
- Teruo YOSHINO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230282505
- Publication date Sep 7, 2023
- Kokusai Electric Corporation
- Atsushi MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20230104882
- Publication date Apr 6, 2023
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220301864
- Publication date Sep 22, 2022
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20220005712
- Publication date Jan 6, 2022
- Kokusai Electric Corporation
- Keita Ichimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210395887
- Publication date Dec 23, 2021
- Kokusai Electric Corporation
- Naofumi OHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200312625
- Publication date Oct 1, 2020
- Kokusai Electric Corporation
- Teruo YOSHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200035523
- Publication date Jan 30, 2020
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE MEASUREMENT UNIT
- Publication number 20190019699
- Publication date Jan 17, 2019
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing Semiconductor Device
- Publication number 20170372894
- Publication date Dec 28, 2017
- Hitachi Kokusai Electric Inc.
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20170081764
- Publication date Mar 23, 2017
- Hitachi Kokusai Electric Inc.
- Yukinori ABURATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20150371832
- Publication date Dec 24, 2015
- Hitachi Kokusai Electric Inc.
- Hidehiro YANAI
- B08 - CLEANING
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20130012035
- Publication date Jan 10, 2013
- Hitachi Kokusai Electric Inc.
- Yukinori Aburatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20110170989
- Publication date Jul 14, 2011
- Hitachi Kokusai Electric Inc.
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
- Publication number 20100280653
- Publication date Nov 4, 2010
- Hitachi Kokusai Electric Inc.
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100229416
- Publication date Sep 16, 2010
- Hitachi Kokusai Electric Inc.
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20090269937
- Publication date Oct 29, 2009
- Hitachi Kokusai Electric, Inc.
- Yukinori ABURATANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus, method of manufacturing semiconduct...
- Publication number 20090191718
- Publication date Jul 30, 2009
- Hitachi Kokusai Electric Inc.
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and manufacturing method for semicon...
- Publication number 20090185892
- Publication date Jul 23, 2009
- Hitachi Kokusai Electric Inc.
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and manufacturing method of a semico...
- Publication number 20090003977
- Publication date Jan 1, 2009
- Hitachi Kokusai Electric Inc.
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and semiconductor device manufacturi...
- Publication number 20080260502
- Publication date Oct 23, 2008
- Hitachi Kokusai Electric Inc.
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, method of manufacturing semiconduct...
- Publication number 20080173238
- Publication date Jul 24, 2008
- Hitachi Kokusai Electric Inc.
- Seiyo Nakashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus, method of manufacturing semiconduct...
- Publication number 20080153314
- Publication date Jun 26, 2008
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and manufacturing method for semicon...
- Publication number 20080134483
- Publication date Jun 12, 2008
- Hitachi Kokusai Electric Inc.
- Yukinori Aburatani
- H01 - BASIC ELECTRIC ELEMENTS

Yukinori ABURATANI

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus and temperature measurement unit

Method of manufacturing semiconductor device

Method of manufacturing semiconductor device

Plasma processing apparatus and method of manufacturing semiconduct...

Method of manufacturing semiconductor device

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and semiconductor device manufacturi...

Method of manufacturing a semiconductor device

Substrate processing apparatus and manufacturing method of a semico...

Substrate processing apparatus and manufacturing method for semicon...

Semiconductor manufacturing equipment

Semiconductor manufacturing equipment

Substrate processing apparatus having gas side flow via gas inlet

Treatment object conveyor apparatus, semiconductor manufacturing ap...

Substrate transferring mechanism

Substrate processing apparatus with a processing chamber, transfer...

Substrate processing apparatus

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

SUBSTRATE PROCESSING APPARATUS, PROCESSING VESSEL, AND METHOD OF MA...

Substrate Processing Apparatus, Substrate Processing Method, Method...

SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPOR...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, GAS SUPPLY METHOD, SU...

SUBSTRATE PROCESSING APPARATUS, PLASMA GENERATION APPARATUS, METHOD...

MAINTENANCE METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, N...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE MEASUREMENT UNIT

Method of Manufacturing Semiconductor Device

SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus and manufacturing method for semicon...

Substrate processing apparatus and manufacturing method of a semico...

Substrate processing apparatus and semiconductor device manufacturi...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus and manufacturing method for semicon...