Yukinori Aida

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Height measuring device, charged particle beam apparatus, and heigh...
- Patent number 11,754,388
- Issue date Sep 12, 2023
- Jeol Ltd.
- Yukinori Aida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Beam Drawing Apparatus and Control Method for Char...
- Publication number 20230075825
- Publication date Mar 9, 2023
- JEOL Ltd.
- Yukinori Aida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Height Measuring Device, Charged Particle Beam Apparatus, and Heigh...
- Publication number 20210207945
- Publication date Jul 8, 2021
- JEOL Ltd.
- Yukinori Aida
- H01 - BASIC ELECTRIC ELEMENTS