Yukinori Sakiyama

Person

West Linn, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Control of wafer bow in multiple stations
- Patent number 11,823,928
- Issue date Nov 21, 2023
- Lam Research Corporation
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planar substrate edge contact with open volume equalization pathway...
- Patent number 11,443,975
- Issue date Sep 13, 2022
- Lam Research Corporation
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for controlling plasma instability in semicondu...
- Patent number 11,393,729
- Issue date Jul 19, 2022
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of wafer bow in multiple stations
- Patent number 11,183,406
- Issue date Nov 23, 2021
- Lam Research Corporation
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planar substrate edge contact with open volume equalization pathway...
- Patent number 10,622,243
- Issue date Apr 14, 2020
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of water bow in multiple stations
- Patent number 10,553,465
- Issue date Feb 4, 2020
- Lam Research Corporation
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for controlling plasma instability in semicondu...
- Patent number 10,510,625
- Issue date Dec 17, 2019
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier ring wall for reduction of back-diffusion of reactive speci...
- Patent number 10,475,627
- Issue date Nov 12, 2019
- Lam Research Corporation
- Chengzhu Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low volume showerhead with faceplate holes for improved flow unifor...
- Patent number 10,378,107
- Issue date Aug 13, 2019
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetric pedestal/carrier ring arrangement for edge impedance mod...
- Patent number 10,301,718
- Issue date May 28, 2019
- Lam Research Corporation
- Ryan Blaquiere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for detection of plasma instability by electric...
- Patent number 10,128,160
- Issue date Nov 13, 2018
- Lam Research Corporation
- Yukinori Sakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for detection of plasma instability by optical...
- Patent number 10,121,708
- Issue date Nov 6, 2018
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for frequency modulation of radiofrequency powe...
- Patent number 9,997,422
- Issue date Jun 12, 2018
- Lam Research Corporation
- Ishtak Karim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for using electrical asymmetry effect to contro...
- Patent number 9,941,113
- Issue date Apr 10, 2018
- Lam Research Corporation
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metrology methods to detect plasma in wafer cavity and use of the m...
- Patent number 9,875,883
- Issue date Jan 23, 2018
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for detection of plasma instability by electric...
- Patent number 9,824,941
- Issue date Nov 21, 2017
- Lam Research Corporation
- Yukinori Sakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology methods to detect plasma in wafer cavity and use of the m...
- Patent number 9,754,769
- Issue date Sep 5, 2017
- Lam Research Corporation
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for using electrical asymmetry effect to contro...
- Patent number 9,644,271
- Issue date May 9, 2017
- Lam Research Corporation
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition-matched curtain gas mixtures for edge uniformity modula...
- Patent number 9,508,547
- Issue date Nov 29, 2016
- Lam Research Corporation
- Frank L. Pasquale
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS
- Publication number 20240410760
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...
- Publication number 20240355600
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE ANALYSIS OF PLASMA CONDITIONS
- Publication number 20240234112
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Michal Danek
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
- Publication number 20240055285
- Publication date Feb 15, 2024
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOOL FOR PREVENTING OR SUPPRESSING ARCING
- Publication number 20230416922
- Publication date Dec 28, 2023
- LAM RESEARCH CORPORATION
- Yukinori SAKIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE PEDESTAL WITH EXTENDED ELECTROSTATIC CHUCK ELECTRODE
- Publication number 20230369091
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Feng BI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR PROVIDING SHUNT CANCELLATION OF PARASITIC C...
- Publication number 20230246624
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Yaswanth Rangineni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTOELECTRON ASSISTED PLASMA IGNITION
- Publication number 20230207274
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Lee CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION AND LOCATION OF ANOMALOUS PLASMA EVENTS IN FABRICATION CH...
- Publication number 20220406578
- Publication date Dec 22, 2022
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- G01 - MEASURING TESTING
Information Patent Application
PROCESSING TOOL CAPABLE FOR FORMING CARBON LAYERS ON SUBSTRATES
- Publication number 20220246428
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Karl Frederick LEESER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING TOOL CAPABLE OF MODULATING ONE OR MORE PLASMA...
- Publication number 20220119954
- Publication date Apr 21, 2022
- Lee CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
- Publication number 20220051919
- Publication date Feb 17, 2022
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...
- Publication number 20220037135
- Publication date Feb 3, 2022
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20200227304
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20200219757
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Patrick BREILING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
- Publication number 20200118856
- Publication date Apr 16, 2020
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Controlling Plasma Instability in Semicondu...
- Publication number 20200098651
- Publication date Mar 26, 2020
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION TOOL FOR PREVENTING OR SUPPRESSING ARCING
- Publication number 20200048770
- Publication date Feb 13, 2020
- LAM RESEARCH CORPORATION
- Yukinori SAKIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR PROVIDING SHUNT CANCELLATION OF PARASITIC C...
- Publication number 20180175819
- Publication date Jun 21, 2018
- LAM RESEARCH CORPORATION
- Yaswanth Rangineni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20180122685
- Publication date May 3, 2018
- LAM RESEARCH CORPORATION
- Patrick Breiling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Detection of Plasma Instability by Electric...
- Publication number 20180076100
- Publication date Mar 15, 2018
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROL OF WAFER BOW IN MULTIPLE STATIONS
- Publication number 20180025930
- Publication date Jan 25, 2018
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metrology Methods to Detect Plasma in Wafer Cavity and Use of the M...
- Publication number 20170338085
- Publication date Nov 23, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Using Electrical Asymmetry Effect to Contro...
- Publication number 20170330744
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ASYMMETRIC PEDESTAL/CARRIER RING ARRANGEMENT FOR EDGE IMPEDANCE MOD...
- Publication number 20170275756
- Publication date Sep 28, 2017
- LAM RESEARCH CORPORATION
- Ryan Blaquiere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER RING WALL FOR REDUCTION OF BACK-DIFFUSION OF REACTIVE SPECI...
- Publication number 20170278681
- Publication date Sep 28, 2017
- LAM RESEARCH CORPORATION
- Chengzhu Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Controlling Plasma Instability in Semicondu...
- Publication number 20170140968
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Detection of Plasma Instability by Optical...
- Publication number 20170141001
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Detection of Plasma Instability by Electric...
- Publication number 20170141000
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Frequency Modulation of Radiofrequency Powe...
- Publication number 20170141002
- Publication date May 18, 2017
- LAM RESEARCH CORPORATION
- Ishtak Karim
- H01 - BASIC ELECTRIC ELEMENTS

Yukinori Sakiyama

Person

Patents Grantslast 30 patents

Control of wafer bow in multiple stations

Planar substrate edge contact with open volume equalization pathway...

Systems and methods for controlling plasma instability in semicondu...

Control of wafer bow in multiple stations

Planar substrate edge contact with open volume equalization pathway...

Control of water bow in multiple stations

Systems and methods for controlling plasma instability in semicondu...

Carrier ring wall for reduction of back-diffusion of reactive speci...

Low volume showerhead with faceplate holes for improved flow unifor...

Asymmetric pedestal/carrier ring arrangement for edge impedance mod...

Systems and methods for detection of plasma instability by electric...

Systems and methods for detection of plasma instability by optical...

Systems and methods for frequency modulation of radiofrequency powe...

Systems and methods for using electrical asymmetry effect to contro...

Metrology methods to detect plasma in wafer cavity and use of the m...

Systems and methods for detection of plasma instability by electric...

Metrology methods to detect plasma in wafer cavity and use of the m...

Systems and methods for using electrical asymmetry effect to contro...

Composition-matched curtain gas mixtures for edge uniformity modula...

Patents Applicationslast 30 patents

THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS

ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...

IMAGE ANALYSIS OF PLASMA CONDITIONS

CONTROL OF WAFER BOW IN MULTIPLE STATIONS

TOOL FOR PREVENTING OR SUPPRESSING ARCING

HIGH TEMPERATURE PEDESTAL WITH EXTENDED ELECTROSTATIC CHUCK ELECTRODE

SYSTEMS AND METHODS FOR PROVIDING SHUNT CANCELLATION OF PARASITIC C...

PHOTOELECTRON ASSISTED PLASMA IGNITION

DETECTION AND LOCATION OF ANOMALOUS PLASMA EVENTS IN FABRICATION CH...

PROCESSING TOOL CAPABLE FOR FORMING CARBON LAYERS ON SUBSTRATES

SUBSTRATE PROCESSING TOOL CAPABLE OF MODULATING ONE OR MORE PLASMA...

CONTROL OF WAFER BOW IN MULTIPLE STATIONS

ANOMALOUS PLASMA EVENT DETECTION AND MITIGATION IN SEMICONDUCTOR PR...

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

CONTROL OF WAFER BOW IN MULTIPLE STATIONS

Systems and Methods for Controlling Plasma Instability in Semicondu...

CHEMICAL VAPOR DEPOSITION TOOL FOR PREVENTING OR SUPPRESSING ARCING

SYSTEMS AND METHODS FOR PROVIDING SHUNT CANCELLATION OF PARASITIC C...

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

Systems and Methods for Detection of Plasma Instability by Electric...

CONTROL OF WAFER BOW IN MULTIPLE STATIONS

Metrology Methods to Detect Plasma in Wafer Cavity and Use of the M...

Systems and Methods for Using Electrical Asymmetry Effect to Contro...

ASYMMETRIC PEDESTAL/CARRIER RING ARRANGEMENT FOR EDGE IMPEDANCE MOD...

CARRIER RING WALL FOR REDUCTION OF BACK-DIFFUSION OF REACTIVE SPECI...

Systems and Methods for Controlling Plasma Instability in Semicondu...

Systems and Methods for Detection of Plasma Instability by Optical...

Systems and Methods for Detection of Plasma Instability by Electric...

Systems and Methods for Frequency Modulation of Radiofrequency Powe...