Yukio Fukuda

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Nakakoma-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas switching mechanism for plasma processing apparatus
- Patent number 7,717,061
- Issue date May 18, 2010
- Tokyo Electron Limited
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Thin-film formation in semiconductor device fabrication process and...
- Publication number 20060068104
- Publication date Mar 30, 2006
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing apparatus and processing method
- Publication number 20060027167
- Publication date Feb 9, 2006
- TOKYO ELECTRON LIMITED
- Tadahiro Ishizaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...