Yukio Kembo

Person

Tsuchiura-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Scanning probe microscope
- Patent number 8,844,061
- Issue date Sep 23, 2014
- Hitachi, Ltd.
- Shuichi Baba
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope
- Patent number 8,342,008
- Issue date Jan 1, 2013
- Hitachi, Ltd.
- Shuichi Baba
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning probe microscope
- Patent number 8,011,230
- Issue date Sep 6, 2011
- Hitachi, Ltd.
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of detecting defects on an object
- Patent number 7,940,383
- Issue date May 10, 2011
- Hitachi, Ltd.
- Minori Noguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,692,779
- Issue date Apr 6, 2010
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,639,350
- Issue date Dec 29, 2009
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope
- Patent number 7,631,548
- Issue date Dec 15, 2009
- Hitachi, Ltd.
- Shuichi Baba
- G01 - MEASURING TESTING
Information Patent Grant
Scanning probe microscope
- Patent number 7,498,589
- Issue date Mar 3, 2009
- Hitachi Kenki Fine Tech Co., Ltd.
- Shigenobu Maruyama
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,443,496
- Issue date Oct 28, 2008
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring depth of holes formed on a specimen
- Patent number 7,243,441
- Issue date Jul 17, 2007
- Hitachi Kenki Fine Tech Co., Ltd.
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for analyzing the state of generation of forei...
- Patent number 7,177,020
- Issue date Feb 13, 2007
- Renesas Technology Corp.
- Hiroshi Morioka
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspecting defects and an apparatus of the same
- Patent number 7,173,693
- Issue date Feb 6, 2007
- Hitachi, Ltd.
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,098,055
- Issue date Aug 29, 2006
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,037,735
- Issue date May 2, 2006
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for analyzing the state of generation of forei...
- Patent number 6,894,773
- Issue date May 17, 2005
- Renesas Technology Corp.
- Hiroshi Morioka
- G01 - MEASURING TESTING
Information Patent Grant
Method for inspecting defects and an apparatus for the same
- Patent number 6,850,320
- Issue date Feb 1, 2005
- Hitachi, Ltd.
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device producing method, system for carrying out the...
- Patent number 6,650,409
- Issue date Nov 18, 2003
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Optical apparatus for defect and particle size inspection
- Patent number 6,411,377
- Issue date Jun 25, 2002
- Hitachi, Ltd.
- Minori Noguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for analyzing the state of generation of forei...
- Patent number 5,463,459
- Issue date Oct 31, 1995
- Hitachi, Ltd.
- Hiroshi Morioka
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for inspecting foreign particles on real time...
- Patent number 5,274,434
- Issue date Dec 28, 1993
- Hitachi, Ltd.
- Hiroshi Morioka
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus of inspecting foreign matters during mass prod...
- Patent number 5,233,191
- Issue date Aug 3, 1993
- Hitachi, Ltd.
- Minori Noguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for detecting photoacoustic signal
- Patent number 5,136,172
- Issue date Aug 4, 1992
- Hitachi, Ltd.
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Grant
Photocoustic signal detecting device
- Patent number 5,083,869
- Issue date Jan 28, 1992
- Hitachi, Ltd.
- Toshihiko Nakata
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting photoacoustic signal and method...
- Patent number 5,062,715
- Issue date Nov 5, 1991
- Hitachi, Ltd.
- Toshihiko Nakata
- G02 - OPTICS
Information Patent Grant
X-ray lithography apparatus
- Patent number 4,852,133
- Issue date Jul 25, 1989
- Hitachi, Ltd.
- Minoru Ikeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray exposure apparatus
- Patent number 4,825,453
- Issue date Apr 25, 1989
- Hitachi, Ltd.
- Yukio Kembo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
X-ray exposure system
- Patent number 4,803,712
- Issue date Feb 7, 1989
- Hitachi, Ltd.
- Yukio Kembo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate surface deflecting device
- Patent number 4,788,577
- Issue date Nov 29, 1988
- Hitachi, Ltd.
- Nobuyuki Akiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for alignment
- Patent number 4,777,641
- Issue date Oct 11, 1988
- Hitachi, Ltd.
- Akira Inagaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection alignment method and apparatus
- Patent number 4,708,484
- Issue date Nov 24, 1987
- Hitachi, Ltd.
- Yoshihiro Komeyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SCANNING PROBE MICROSCOPE
- Publication number 20140298548
- Publication date Oct 2, 2014
- Shuichi BABA
- B82 - NANO-TECHNOLOGY
Information Patent Application
SCANNING PROBE MICROSCOPE
- Publication number 20130205454
- Publication date Aug 8, 2013
- Hitachi, Ltd
- Shuichi BABA
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus And Method For Testing Defects
- Publication number 20100088042
- Publication date Apr 8, 2010
- Minori NOGUCHI
- G01 - MEASURING TESTING
Information Patent Application
Scanning Probe Microscope
- Publication number 20090158828
- Publication date Jun 25, 2009
- Shuichi BABA
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE AND MEASUREMENT METHOD OF SAME
- Publication number 20080245139
- Publication date Oct 9, 2008
- Takafumi Morimoto
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE MICROSCOPE
- Publication number 20080223122
- Publication date Sep 18, 2008
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Application
PROBE CONTROL METHOD FOR SCANNING PROBE MICROSCOPE
- Publication number 20080087820
- Publication date Apr 17, 2008
- Toru KURENUMA
- G01 - MEASURING TESTING
Information Patent Application
Scanning Probe Microscope
- Publication number 20070266780
- Publication date Nov 22, 2007
- SHUICHI BABA
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR TESTING DEFECTS
- Publication number 20070146696
- Publication date Jun 28, 2007
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR TESTING DEFECTS
- Publication number 20070146697
- Publication date Jun 28, 2007
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for determining surface profiles using a scann...
- Publication number 20060097162
- Publication date May 11, 2006
- Shigenobu Maruyama
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for testing defects
- Publication number 20060030060
- Publication date Feb 9, 2006
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for testing defects
- Publication number 20060030059
- Publication date Feb 9, 2006
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for analyzing the state of generation of forei...
- Publication number 20050206887
- Publication date Sep 22, 2005
- Hiroshi Morioka
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for measuring depth of holes formed on a specimen
- Publication number 20050183282
- Publication date Aug 25, 2005
- Masahiro Watanabe
- G01 - MEASURING TESTING
Information Patent Application
Method for inspecting defects and an apparatus of the same
- Publication number 20050128472
- Publication date Jun 16, 2005
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for testing defects
- Publication number 20020168787
- Publication date Nov 14, 2002
- Minori Noguchi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method for inspecting defects and an apparatus of the same
- Publication number 20020027653
- Publication date Mar 7, 2002
- Yukihiro Shibata
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for analyzing the state of generation of forei...
- Publication number 20010021015
- Publication date Sep 13, 2001
- Hiroshi Morioka
- B82 - NANO-TECHNOLOGY

Yukio Kembo

Person

Patents Grantslast 30 patents

Scanning probe microscope

Scanning probe microscope

Scanning probe microscope

Method of detecting defects on an object

Apparatus and method for testing defects

Apparatus and method for testing defects

Scanning probe microscope

Scanning probe microscope

Apparatus and method for testing defects

Method and apparatus for measuring depth of holes formed on a specimen

Method and apparatus for analyzing the state of generation of forei...

Method for inspecting defects and an apparatus of the same

Apparatus and method for testing defects

Apparatus and method for testing defects

Method and apparatus for analyzing the state of generation of forei...

Method for inspecting defects and an apparatus for the same

Semiconductor device producing method, system for carrying out the...

Optical apparatus for defect and particle size inspection

Method and apparatus for analyzing the state of generation of forei...

Method and apparatus for inspecting foreign particles on real time...

Method and apparatus of inspecting foreign matters during mass prod...

Method and apparatus for detecting photoacoustic signal

Photocoustic signal detecting device

Method and apparatus for detecting photoacoustic signal and method...

X-ray lithography apparatus

X-ray exposure apparatus

X-ray exposure system

Substrate surface deflecting device

Method and apparatus for alignment

Projection alignment method and apparatus

Patents Applicationslast 30 patents

SCANNING PROBE MICROSCOPE

SCANNING PROBE MICROSCOPE

Apparatus And Method For Testing Defects

Scanning Probe Microscope

SCANNING PROBE MICROSCOPE AND MEASUREMENT METHOD OF SAME

SCANNING PROBE MICROSCOPE

PROBE CONTROL METHOD FOR SCANNING PROBE MICROSCOPE

Scanning Probe Microscope

APPARATUS AND METHOD FOR TESTING DEFECTS

APPARATUS AND METHOD FOR TESTING DEFECTS

Apparatus and method for determining surface profiles using a scann...

Apparatus and method for testing defects

Apparatus and method for testing defects

Method and apparatus for analyzing the state of generation of forei...

Method and apparatus for measuring depth of holes formed on a specimen

Method for inspecting defects and an apparatus of the same

Apparatus and method for testing defects

Method for inspecting defects and an apparatus of the same

Method and apparatus for analyzing the state of generation of forei...