Yukio Kiba

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Developing treatment method, program, computer storage medium and d...
- Patent number 8,518,480
- Issue date Aug 27, 2013
- Tokyo Electron Limited
- Norifumi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing device, substrate processing method, and devel...
- Patent number 7,387,455
- Issue date Jun 17, 2008
- Tokyo Electron Limited
- Tetsutoshi Awamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resist processing system having process solution deaeration mechanism
- Patent number 6,217,657
- Issue date Apr 17, 2001
- Tokyo Electron Limited
- Yukio Kiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating film forming method and coating film forming apparatus
- Patent number 5,939,130
- Issue date Aug 17, 1999
- Tokyo Electron Limited
- Masatoshi Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist processing method and resist processing system
- Patent number 5,866,307
- Issue date Feb 2, 1999
- Tokyo Electron Limited
- Yukio Kiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DEVELOPING TREATMENT METHOD, PROGRAM, COMPUTER STORAGE MEDIUM AND D...
- Publication number 20110183073
- Publication date Jul 28, 2011
- TOKYO ELECTRON LIMITED
- Norifumi Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing device, substrate processing method, and devel...
- Publication number 20050223980
- Publication date Oct 13, 2005
- TOKYO ELECTRON LIMITED
- Tetsutoshi Awamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY