Yukio Kikuchi

Person

Chigasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Dummy substrate, and start method of, retention/modification method...
- Patent number 9,011,654
- Issue date Apr 21, 2015
- Ulvac, Inc.
- Koji Ishino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Supporting member and carrier, and method of supporting
- Patent number 8,550,441
- Issue date Oct 8, 2013
- Ulvac, Inc.
- Koji Ishino
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Vertical substrate transfer apparatus and film-forming apparatus
- Patent number 8,128,793
- Issue date Mar 6, 2012
- ULVAC, Inc.
- Hajime Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SPUTTERING DEVICE
- Publication number 20130048494
- Publication date Feb 28, 2013
- ULVAC, Inc.
- Yukio Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE STAGE, SPUTTERING APPARATUS PROVIDED WITH SAME, AND FILM...
- Publication number 20100270143
- Publication date Oct 28, 2010
- ULVAC, Inc.
- Yukio Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS AND FILM FORMING METHOD
- Publication number 20100258430
- Publication date Oct 14, 2010
- ULVAC, Inc.
- Yukio Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUMMY SUBSTRATE, AND START METHOD OF, RETENTION/MODIFICATION METHOD...
- Publication number 20100175990
- Publication date Jul 15, 2010
- ULVAC, Inc.
- Koji Ishino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORTING MEMBER AND CARRIER, AND METHOD OF SUPPORTING
- Publication number 20100117280
- Publication date May 13, 2010
- ULVAC, Inc.
- Koji Ishino
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SPUTTERING APPARATUS AND FILM FORMING METHOD
- Publication number 20090294279
- Publication date Dec 3, 2009
- ULVAC, INC.
- Yukio Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vertical Substrate Transfer Apparatus and Film-Forming Apparatus
- Publication number 20090139864
- Publication date Jun 4, 2009
- Hajime Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Magnetic Multi-layered Film
- Publication number 20090053833
- Publication date Feb 26, 2009
- ULVAC, INC.
- Yukio Kikuchi
- G11 - INFORMATION STORAGE

Yukio Kikuchi

Person

Patents Grantslast 30 patents

Dummy substrate, and start method of, retention/modification method...

Supporting member and carrier, and method of supporting

Vertical substrate transfer apparatus and film-forming apparatus

Patents Applicationslast 30 patents

SPUTTERING DEVICE

SUBSTRATE STAGE, SPUTTERING APPARATUS PROVIDED WITH SAME, AND FILM...

SPUTTERING APPARATUS AND FILM FORMING METHOD

DUMMY SUBSTRATE, AND START METHOD OF, RETENTION/MODIFICATION METHOD...

SUPPORTING MEMBER AND CARRIER, AND METHOD OF SUPPORTING

SPUTTERING APPARATUS AND FILM FORMING METHOD

Vertical Substrate Transfer Apparatus and Film-Forming Apparatus

Method of Manufacturing Magnetic Multi-layered Film