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Yukio MIYATA
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Toyama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus, device management controller, and r...
Patent number
11,966,210
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing apparatus, device management controller, and r...
Patent number
11,237,538
Issue date
Feb 1, 2022
Kokusai Electric Corporation
Kazuhide Asai
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...
Publication number
20220019191
Publication date
Jan 20, 2022
Kokusai Electric Corporation
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...
Publication number
20200192324
Publication date
Jun 18, 2020
Kokusai Electric Corporation
Kazuhide ASAI
G05 - CONTROLLING REGULATING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND R...
Publication number
20170285613
Publication date
Oct 5, 2017
Hitachi Kokusai Electric Inc.
Kazuhide ASAI
G05 - CONTROLLING REGULATING