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Yukio Muroi
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Tokyo, JP
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last 30 patents
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Patent Grant
Silicon wafer, and heat treatment method of the same and the heat-t...
Patent number
6,682,597
Issue date
Jan 27, 2004
Mitsubishi Materials Silicon Corporation
Hiroshi Koya
C30 - CRYSTAL GROWTH
Information
Patent Grant
Silicon wafer, and heat treatment method of the same and the heat-t...
Patent number
6,428,619
Issue date
Aug 6, 2002
Mitsubishi Materials Silicon Corporation
Hiroshi Koya
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
METHOD FOR MANUFACTURING A SILICON WAFER
Publication number
20110263126
Publication date
Oct 27, 2011
SUMCO CORPORATION
Kazuhiro HARADA
C30 - CRYSTAL GROWTH
Information
Patent Application
Silicon wafer, and heat treatment method of the same and the heat-t...
Publication number
20030051660
Publication date
Mar 20, 2003
Hiroshi Koya
C30 - CRYSTAL GROWTH