Yukio Nakagawa

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Hitachi, JP

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Patents Grantslast 30 patents

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Method and apparatus for forming a film
- Patent number 5,064,520
- Issue date Nov 12, 1991
- Hitachi, Ltd.
- Kiyoshi Miyake
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputter apparatus and method for forming films by using t...
- Patent number 4,865,709
- Issue date Sep 12, 1989
- Hitachi, Ltd.
- Yukio Nakagawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Puffer type gas circuit breaker
- Patent number 4,132,876
- Issue date Jan 2, 1979
- Hitachi, Ltd.
- Minoru Sato
- H01 - BASIC ELECTRIC ELEMENTS