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YUKIO OHIZUMI

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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 11,674,225
    • Issue date Jun 13, 2023
    • Tokyo Electron Limted
    • Hitoshi Kato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Rotation detection jig, substrate processing apparatus and method o...
    • Patent number 11,572,625
    • Issue date Feb 7, 2023
    • Tokyo Electron Limited
    • Takeshi Kobayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 10,584,416
    • Issue date Mar 10, 2020
    • Tokyo Electron Limited
    • Hitoshi Kato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus and substrate processing method
    • Patent number 10,221,480
    • Issue date Mar 5, 2019
    • Tokyo Electron Limited
    • Hitoshi Kato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,845,857
    • Issue date Sep 30, 2014
    • Tokyo Electron Limited
    • Yukio Ohizumi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film deposition apparatus and film deposition method
    • Patent number 8,034,723
    • Issue date Oct 11, 2011
    • Tokyo Electron Limited
    • Yukio Ohizumi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Processing apparatus
    • Patent number 7,674,336
    • Issue date Mar 9, 2010
    • Tokyo Electron Limited
    • Manabu Honma
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    GATE VALVE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSIN...
    • Publication number 20240068090
    • Publication date Feb 29, 2024
    • KITZ SCT CORPORATION
    • Yoshifumi HOSHINO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ROTATION DETECTION JIG, SUBSTRATE PROCESSING APPARATUS AND METHOD O...
    • Publication number 20180251892
    • Publication date Sep 6, 2018
    • TOKYO ELECTRON LIMITED
    • Takeshi Kobayashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Apparatus
    • Publication number 20180195173
    • Publication date Jul 12, 2018
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20170218514
    • Publication date Aug 3, 2017
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20170067160
    • Publication date Mar 9, 2017
    • TOKYO ELECTRON LIMITED
    • Hitoshi KATO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND FILM DEPOSITION APPARATUS
    • Publication number 20130047924
    • Publication date Feb 28, 2013
    • TOKYO ELECTRON LIMITED
    • Tadashi Enomoto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
    • Publication number 20110159702
    • Publication date Jun 30, 2011
    • TOKYO ELECTRON LIMITED
    • YUKIO OHIZUMI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20110126985
    • Publication date Jun 2, 2011
    • TOKYO ELECTRON LIMITED
    • YUKIO OHIZUMI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Processing apparatus
    • Publication number 20070075086
    • Publication date Apr 5, 2007
    • Manabu Honma
    • C30 - CRYSTAL GROWTH