Yukio Oppata

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Chiba-ken, JP

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Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE STORING CASE, SUBSTRATE CLEANING APPARATUS AND SUBSTRATE...
- Publication number 20150258226
- Publication date Sep 17, 2015
- Kabushiki Kaisha Toshiba
- Yukio Oppata
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND MASK MANUFACTURING METHOD
- Publication number 20090305153
- Publication date Dec 10, 2009
- Hideaki Sakurai
- B08 - CLEANING