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Yukio Sato
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Osaka, JP
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Patents Grants
last 30 patents
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Patent Grant
Matching unit for semiconductor plasma processing apparatus
Patent number
7,132,040
Issue date
Nov 7, 2006
Pearl Kogyo Co., Ltd.
Etsuo Yamagishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chopper type comparator
Patent number
6,566,916
Issue date
May 20, 2003
Oki Electric Industry Co., Ltd.
Haruaki Morimoto
H03 - BASIC ELECTRONIC CIRCUITRY
Patents Applications
last 30 patents
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Patent Application
Matching unit for semiconductor plasma processing apparatus
Publication number
20050098116
Publication date
May 12, 2005
Etsuo Yamagishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHOPPER TYPE COMPARATOR
Publication number
20030094981
Publication date
May 22, 2003
Haruaki Morimoto
H03 - BASIC ELECTRONIC CIRCUITRY