Yukio Takabayashi

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 9,770,850
- Issue date Sep 26, 2017
- Canon Kabushiki Kaisha
- Makoto Mizuno
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, and article manufacturing method
- Patent number 9,339,970
- Issue date May 17, 2016
- Canon Kabushiki Kaisha
- Shinichi Shudo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus to correct position between reticle and substrat...
- Patent number 8,179,518
- Issue date May 15, 2012
- Canon Kabushiki Kaisha
- Yukio Takabayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding device
- Patent number 7,425,238
- Issue date Sep 16, 2008
- Canon Kabushiki Kaisha
- Yasuyo Muto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Holding device and exposure apparatus using the same
- Patent number 7,352,520
- Issue date Apr 1, 2008
- Canon Kabushiki Kaisha
- Ryota Makino
- G02 - OPTICS
Information Patent Grant
Moving mechanism and stage system in exposure apparatus
- Patent number 7,346,414
- Issue date Mar 18, 2008
- Canon Kabushiki Kaisha
- Hideo Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Retainer, exposure apparatus, and device fabrication method
- Patent number 7,253,975
- Issue date Aug 7, 2007
- Canon Kabushiki Kaisha
- Yukio Takabayashi
- G02 - OPTICS
Information Patent Grant
Retainer, exposure apparatus, and device fabrication method
- Patent number 7,161,750
- Issue date Jan 9, 2007
- Canon Kabushiki Kaisha
- Yukio Takabayashi
- G02 - OPTICS
Information Patent Grant
Moving mechanism and stage system in exposure apparatus
- Patent number 6,990,386
- Issue date Jan 24, 2006
- Canon Kabushiki Kaisha
- Hideo Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus, exposure apparatus, and semiconductor device manuf...
- Patent number 6,965,428
- Issue date Nov 15, 2005
- Canon Kabushiki Kaisha
- Yasuyo Muto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate attracting and holding system for use in exposure apparatus
- Patent number 6,809,802
- Issue date Oct 26, 2004
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate attracting and holding system for use in exposure apparatus
- Patent number 6,762,826
- Issue date Jul 13, 2004
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 6,654,096
- Issue date Nov 25, 2003
- Canon Kabushiki Kaisha
- Itaru Fujita
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device, an exposure apparatus and a device manufacturing meth...
- Patent number 6,583,859
- Issue date Jun 24, 2003
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Driving apparatus and exposure apparatus
- Patent number 6,493,062
- Issue date Dec 10, 2002
- Canon Kabushiki Kaisha
- Yukio Tokuda
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Anti-vibration apparatus, exposure apparatus using the same, device...
- Patent number 6,322,060
- Issue date Nov 27, 2001
- Canon Kabushiki Kaisha
- Takehiko Mayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding apparatus, substrate transfer system, exposure ap...
- Patent number 6,307,620
- Issue date Oct 23, 2001
- Canon Kabushiki Kaisha
- Yukio Takabayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device, an exposure apparatus and a device manufacturing meth...
- Patent number 6,266,133
- Issue date Jul 24, 2001
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and device manufacturing method
- Patent number 6,208,408
- Issue date Mar 27, 2001
- Canon Kabushiki Kaisha
- Yukio Takabayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding system and exposure apparatus using the same
- Patent number 5,923,408
- Issue date Jul 13, 1999
- Canon Kabushiki Kaisha
- Yukio Takabayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus containing an enclosed hollow structure
- Patent number 5,691,806
- Issue date Nov 25, 1997
- Canon Kabushiki Kaisha
- Yukio Tokuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus having mount means to suppress vibrations
- Patent number 5,187,519
- Issue date Feb 16, 1993
- Canon Kabushiki Kaisha
- Yukio Takabayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT APPARATUS, IMPRINT SYSTEM, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20160075076
- Publication date Mar 17, 2016
- Canon Kabushiki Kaisha
- Hiroshi Sato
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND PRODUCTION METHOD FOR ARTICLE
- Publication number 20150165650
- Publication date Jun 18, 2015
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD FOR MANUFACTURING DEVICE
- Publication number 20150001746
- Publication date Jan 1, 2015
- Canon Kabushiki Kaisha
- Yoshikazu Miyajima
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20140312532
- Publication date Oct 23, 2014
- Canon Kabushiki Kaisha
- Makoto Mizuno
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
TRANSFER APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130285270
- Publication date Oct 31, 2013
- Canon Kabushiki Kaisha
- Kenji Yaegashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20130241096
- Publication date Sep 19, 2013
- Canon Kabushiki Kaisha
- Shinichi Shudo
- B82 - NANO-TECHNOLOGY
Information Patent Application
SCANNING EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTUR...
- Publication number 20100002212
- Publication date Jan 7, 2010
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VIBRATION SUPPRESSION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF...
- Publication number 20090224444
- Publication date Sep 10, 2009
- Canon Kabushiki Kaisha
- Takehiko Mayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090044837
- Publication date Feb 19, 2009
- Canon Kabushiki Kaisha
- Hideo Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20080284997
- Publication date Nov 20, 2008
- Canon Kabushiki Kaisha
- Yukio Takabayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HOLDING DEVICE AND EXPOSURE APPARATUS USING THE SAME
- Publication number 20070177282
- Publication date Aug 2, 2007
- Canon Kabushiki Kaisha
- Ryota Makino
- G02 - OPTICS
Information Patent Application
RETAINER, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD
- Publication number 20070014036
- Publication date Jan 18, 2007
- Canon Kabushiki Kaisha
- Yukio Takabayashi
- G02 - OPTICS
Information Patent Application
Stage apparatus, exposure apparatus, and semiconductor device manuf...
- Publication number 20060017909
- Publication date Jan 26, 2006
- Canon Kabushiki Kaisha
- Yasuyo Muto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Moving mechanism and stage system in exposure apparatus
- Publication number 20050280799
- Publication date Dec 22, 2005
- Canon Kabushiki Kaisha
- Hideo Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Retainer, exposure apparatus, and device fabrication method
- Publication number 20050078386
- Publication date Apr 14, 2005
- Yukio Takabayashi
- G02 - OPTICS
Information Patent Application
Substrate holding device
- Publication number 20040150172
- Publication date Aug 5, 2004
- Canon Kabushiki Kaisha
- Yasuyo Muto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Substrate processing apparatus
- Publication number 20040130692
- Publication date Jul 8, 2004
- Canon Kabushiki Kaisha
- Hideo Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, exposure apparatus, and semiconductor device manuf...
- Publication number 20040124594
- Publication date Jul 1, 2004
- Canon Kabushiki Kaisha
- Yasuyo Muto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate attracting and holding system for use in exposure apparatus
- Publication number 20040036850
- Publication date Feb 26, 2004
- Canon Kabushiki Kaisha
- Izumi Tsukamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Moving mechanism and stage system in exposure apparatus
- Publication number 20030040831
- Publication date Feb 27, 2003
- Canon Kabushiki Kaisha
- Hideo Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRIVING APPARATUS AND EXPOSURE APPARATUS
- Publication number 20020054280
- Publication date May 9, 2002
- YUKIO TOKUDA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS USING THE SAME, DEVICE...
- Publication number 20010040324
- Publication date Nov 15, 2001
- FITZPATRICK CELLA HARPER & SCINTO
- TAKEHIKO MAYAMA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Stage device, an exposure apparatus and a device manufacturing meth...
- Publication number 20010028449
- Publication date Oct 11, 2001
- Yoshikazu Miyajima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yukio Takabayashi

Person

Patents Grantslast 30 patents

Imprint apparatus and article manufacturing method

Imprint apparatus, and article manufacturing method

Exposure apparatus to correct position between reticle and substrat...

Substrate holding device

Holding device and exposure apparatus using the same

Moving mechanism and stage system in exposure apparatus

Retainer, exposure apparatus, and device fabrication method

Retainer, exposure apparatus, and device fabrication method

Moving mechanism and stage system in exposure apparatus

Stage apparatus, exposure apparatus, and semiconductor device manuf...

Substrate attracting and holding system for use in exposure apparatus

Substrate attracting and holding system for use in exposure apparatus

Exposure apparatus, and device manufacturing method

Stage device, an exposure apparatus and a device manufacturing meth...

Driving apparatus and exposure apparatus

Anti-vibration apparatus, exposure apparatus using the same, device...

Substrate holding apparatus, substrate transfer system, exposure ap...

Stage device, an exposure apparatus and a device manufacturing meth...

Projection exposure apparatus and device manufacturing method

Substrate holding system and exposure apparatus using the same

Projection exposure apparatus containing an enclosed hollow structure

Exposure apparatus having mount means to suppress vibrations

Patents Applicationslast 30 patents

IMPRINT APPARATUS, IMPRINT SYSTEM, AND METHOD OF MANUFACTURING ARTICLE

IMPRINT METHOD, IMPRINT APPARATUS, AND PRODUCTION METHOD FOR ARTICLE

IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD FOR MANUFACTURING DEVICE

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

TRANSFER APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD

SCANNING EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTUR...

VIBRATION SUPPRESSION APPARATUS, EXPOSURE APPARATUS, AND METHOD OF...

SUBSTRATE PROCESSING APPARATUS

EXPOSURE APPARATUS

HOLDING DEVICE AND EXPOSURE APPARATUS USING THE SAME

RETAINER, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD

Stage apparatus, exposure apparatus, and semiconductor device manuf...

Moving mechanism and stage system in exposure apparatus

Retainer, exposure apparatus, and device fabrication method

Substrate holding device

Substrate processing apparatus

Stage apparatus, exposure apparatus, and semiconductor device manuf...

Substrate attracting and holding system for use in exposure apparatus

Moving mechanism and stage system in exposure apparatus

DRIVING APPARATUS AND EXPOSURE APPARATUS

ANTI-VIBRATION APPARATUS, EXPOSURE APPARATUS USING THE SAME, DEVICE...

Stage device, an exposure apparatus and a device manufacturing meth...