Yukio Tojo

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Continuous processing system, continuous processing method, and pro...
- Patent number 8,664,013
- Issue date Mar 4, 2014
- Tokyo Electron Limited
- Yuichi Takenaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing method for forming structure including amorphous carbon...
- Patent number 8,652,973
- Issue date Feb 18, 2014
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming laminated structure including amorphous carbon film
- Patent number 8,592,324
- Issue date Nov 26, 2013
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Batch processing method for forming structure including amorphous c...
- Patent number 8,222,162
- Issue date Jul 17, 2012
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Collecting unit for semiconductor process
- Patent number 7,727,296
- Issue date Jun 1, 2010
- Tokyo Electron Limited
- Yukio Tojo
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Thin film forming apparatus cleaning method
- Patent number 6,925,731
- Issue date Aug 9, 2005
- Tokyo Electron Limited
- Kazuaki Nishimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of heat treatment
- Patent number 6,635,310
- Issue date Oct 21, 2003
- Tokyo Electron Limited
- Hitoshi Kato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250140552
- Publication date May 1, 2025
- TOKYO ELECTRON LIMITED
- Motoki SHINDEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTINUOUS PROCESSING SYSTEM, CONTINUOUS PROCESSING METHOD, AND PRO...
- Publication number 20130260572
- Publication date Oct 3, 2013
- TOKYO ELECTRON LIMITED
- Yuichi TAKENAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CLEANING THIN FILM FORMING APPARATUS, THIN FILM FORMING...
- Publication number 20120247511
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD FOR FORMING STRUCTURE INCLUDING AMORPHOUS CARBON...
- Publication number 20120238107
- Publication date Sep 20, 2012
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING LAMINATED STRUCTURE INCLUDING AMORPHOUS CARBON FILM
- Publication number 20110195580
- Publication date Aug 11, 2011
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING METHOD FOR FORMING STRUCTURE INCLUDING AMORPHOUS C...
- Publication number 20100311251
- Publication date Dec 9, 2010
- TOKYO ELECTRON LIMITED
- Mitsuhiro OKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Collecting unit for semiconductor process
- Publication number 20080104935
- Publication date May 8, 2008
- Yukio Tojo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Thin film forming apparatus cleaning method
- Publication number 20050090123
- Publication date Apr 28, 2005
- Kazuaki Nishimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Continuous processing system, continuous processing method, and pro...

Processing method for forming structure including amorphous carbon...

Method for forming laminated structure including amorphous carbon film

Batch processing method for forming structure including amorphous c...

Collecting unit for semiconductor process

Thin film forming apparatus cleaning method

Method of heat treatment

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

CONTINUOUS PROCESSING SYSTEM, CONTINUOUS PROCESSING METHOD, AND PRO...

METHOD FOR CLEANING THIN FILM FORMING APPARATUS, THIN FILM FORMING...

PROCESSING METHOD FOR FORMING STRUCTURE INCLUDING AMORPHOUS CARBON...

METHOD FOR FORMING LAMINATED STRUCTURE INCLUDING AMORPHOUS CARBON FILM

BATCH PROCESSING METHOD FOR FORMING STRUCTURE INCLUDING AMORPHOUS C...

Collecting unit for semiconductor process

Thin film forming apparatus cleaning method