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Yukio Tokuda
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Kawasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
7,463,334
Issue date
Dec 9, 2008
Canon Kabushiki Kaisha
Yukio Tokuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Driving apparatus and exposure apparatus
Patent number
6,493,062
Issue date
Dec 10, 2002
Canon Kabushiki Kaisha
Yukio Tokuda
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Stage system and exposure apparatus, and device manufacturing metho...
Patent number
6,320,645
Issue date
Nov 20, 2001
Canon Kabushiki Kaisha
Mitsuru Inoue
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stage system for exposure apparatus
Patent number
6,320,649
Issue date
Nov 20, 2001
Canon Kabushiki Kaisha
Yoshikazu Miyajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method using reticle remount for temperature influence cor...
Patent number
6,103,433
Issue date
Aug 15, 2000
Canon Kabushiki Kaisha
Yukio Tokuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus containing an enclosed hollow structure
Patent number
5,691,806
Issue date
Nov 25, 1997
Canon Kabushiki Kaisha
Yukio Tokuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus having mount means to suppress vibrations
Patent number
5,187,519
Issue date
Feb 16, 1993
Canon Kabushiki Kaisha
Yukio Takabayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for processing a plate-like workpiece
Patent number
4,775,877
Issue date
Oct 4, 1988
Canon Kabushiki Kaisha
Masao Kosugi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask storing mechanism
Patent number
4,757,355
Issue date
Jul 12, 1988
Canon Kabushiki Kaisha
Kazuo Iizuka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
MICROSCOPE
Publication number
20130141562
Publication date
Jun 6, 2013
Canon Kabushiki Kaisha
Masashi Yano
G02 - OPTICS
Information
Patent Application
IMAGE ACQUISITION APPARATUS AND IMAGE ACQUISITION SYSTEM
Publication number
20130033822
Publication date
Feb 7, 2013
Canon Kabushiki Kaisha
Tomofumi Nishikawara
G02 - OPTICS
Information
Patent Application
IMAGING APPARATUS AND CONTROL METHOD THEREFOR
Publication number
20120314050
Publication date
Dec 13, 2012
Canon Kabushiki Kaisha
Ryo Nawata
G02 - OPTICS
Information
Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20080084547
Publication date
Apr 10, 2008
Canon Kabushiki Kaisha
Yukio Tokuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DRIVING APPARATUS AND EXPOSURE APPARATUS
Publication number
20020054280
Publication date
May 9, 2002
YUKIO TOKUDA
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...