Yukio WATANABE

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet light generation apparatus and electronic devic...
- Patent number 11,789,374
- Issue date Oct 17, 2023
- Gigaphoton Inc.
- Yusuke Hoshino
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical apparatus
- Patent number 11,428,892
- Issue date Aug 30, 2022
- Gigaphoton Inc.
- Hiroshi Someya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target supply device, target supply method, and electronic device m...
- Patent number 11,320,740
- Issue date May 3, 2022
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical element angle adjustment device and extreme ultraviolet lig...
- Patent number 10,627,640
- Issue date Apr 21, 2020
- Gigaphoton Inc.
- Kenshiro Nagahama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Structure of connection between optical unit and optical path tube
- Patent number 10,481,354
- Issue date Nov 19, 2019
- Gigaphoton Inc.
- Yukio Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,894,743
- Issue date Feb 13, 2018
- Gigaphoton Inc.
- Yukio Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror device
- Patent number 9,882,334
- Issue date Jan 30, 2018
- Gigaphoton Inc.
- Toru Suzuki
- G02 - OPTICS
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 9,429,847
- Issue date Aug 30, 2016
- Gigaphoton Inc.
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 9,332,625
- Issue date May 3, 2016
- Gigaphoton Inc.
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,301,379
- Issue date Mar 29, 2016
- Gigaphoton Inc.
- Yukio Watanabe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Mirror device
- Patent number 9,229,192
- Issue date Jan 5, 2016
- Gigaphoton Inc.
- Hiroshi Someya
- G02 - OPTICS
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,198,273
- Issue date Nov 24, 2015
- Gigaphoton Inc.
- Miwa Igarashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 9,179,534
- Issue date Nov 3, 2015
- Gigaphoton Inc.
- Yukio Watanabe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 9,052,615
- Issue date Jun 9, 2015
- Gigaphoton Inc.
- Toshihiro Nishisaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror device
- Patent number 9,046,651
- Issue date Jun 2, 2015
- Gigaphoton Inc.
- Hiroshi Someya
- G02 - OPTICS
Information Patent Grant
Temperature controller for gas laser
- Patent number 8,811,438
- Issue date Aug 19, 2014
- Gigaphoton Inc.
- Yukio Watanabe
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Temperature controller for gas laser
- Patent number 8,787,413
- Issue date Jul 22, 2014
- Gigaphoton Inc.
- Yukio Watanabe
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Target supply device
- Patent number 8,779,402
- Issue date Jul 15, 2014
- Gigaphoton Inc.
- Takayuki Yabu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Chamber apparatus and extreme ultraviolet light generation system
- Patent number 8,759,804
- Issue date Jun 24, 2014
- Gigaphoton Inc.
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation system
- Patent number 8,698,111
- Issue date Apr 15, 2014
- Gigaphonton Inc.
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,669,542
- Issue date Mar 11, 2014
- Gigaphoton Inc.
- Yukio Watanabe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chamber apparatus and method of maintaining target supply unit
- Patent number 8,497,489
- Issue date Jul 30, 2013
- Gigaphoton Inc.
- Takayuki Yabu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature controller for gas laser
- Patent number 8,498,317
- Issue date Jul 30, 2013
- Gigaphoton Inc.
- Yukio Watanabe
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Differential evacuation system
- Patent number 8,258,492
- Issue date Sep 4, 2012
- Gigaphoton Inc.
- Hiroshi Someya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Temperature controller for gas laser
- Patent number 8,238,392
- Issue date Aug 7, 2012
- Gigaphoton Inc.
- Yukio Watanabe
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Semiconductor light-emitting element
- Patent number 7,122,446
- Issue date Oct 17, 2006
- Kabushiki Kaisha Toshiba
- Koichi Nitta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image processing unit, image processing system using the same, and...
- Patent number 7,042,448
- Issue date May 9, 2006
- Kabushiki Kaisha Toshiba
- Atsushi Kunimatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor light emitting element with improved light extraction...
- Patent number 6,956,241
- Issue date Oct 18, 2005
- Kabushiki Kaisha Toshiba
- Hideto Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Renaming apparatus and processor
- Patent number 6,938,149
- Issue date Aug 30, 2005
- Kabushiki Kaisha Toshiba
- Atsushi Kunimatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor light-emitting device and method of manufacturing the...
- Patent number 6,846,686
- Issue date Jan 25, 2005
- Kabushiki Kaisha Toshiba
- Ryo Saeki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
- Publication number 20240027920
- Publication date Jan 25, 2024
- Gigaphoton Inc.
- Yusuke HOSHINO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...
- Publication number 20220082927
- Publication date Mar 17, 2022
- Gigaphoton Inc.
- Yusuke HOSHINO
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...
- Publication number 20210364927
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL APPARATUS
- Publication number 20210103118
- Publication date Apr 8, 2021
- Gigaphoton Inc.
- Hiroshi SOMEYA
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT ANGLE ADJUSTMENT DEVICE AND EXTREME ULTRAVIOLET LIG...
- Publication number 20190113765
- Publication date Apr 18, 2019
- Gigaphoton Inc.
- Kenshiro NAGAHAMA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
STRUCTURE OF CONNECTION BETWEEN OPTICAL UNIT AND OPTICAL PATH TUBE
- Publication number 20180341077
- Publication date Nov 29, 2018
- Gigaphoton Inc.
- Yukio WATANABE
- G02 - OPTICS
Information Patent Application
MIRROR DEVICE
- Publication number 20160315439
- Publication date Oct 27, 2016
- Gigaphoton Inc.
- Toru SUZUKI
- G02 - OPTICS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20160187787
- Publication date Jun 30, 2016
- GIGAPHOTON INC.
- Toshihiro NISHISAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20160192469
- Publication date Jun 30, 2016
- GIGAPHOTON INC.
- Yukio WATANABE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20150245457
- Publication date Aug 27, 2015
- GIGAPHOTON INC.
- Toshihiro NISHISAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MIRROR DEVICE
- Publication number 20150226935
- Publication date Aug 13, 2015
- GIGAPHOTON INC.
- Hiroshi Someya
- G02 - OPTICS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20140332700
- Publication date Nov 13, 2014
- Miwa IGARASHI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20140131587
- Publication date May 15, 2014
- GIGAPHOTON INC.
- Yukio WATANABE
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20140001369
- Publication date Jan 2, 2014
- GIGAPHOTON INC.
- Toshihiro NISHISAKA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TEMPERATURE CONTROLLER FOR GAS LASER
- Publication number 20130294470
- Publication date Nov 7, 2013
- Yukio Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLER FOR GAS LASER
- Publication number 20130294469
- Publication date Nov 7, 2013
- Yukio Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER APPARATUS AND METHOD OF MAINTAINING TARGET SUPPLY UNIT
- Publication number 20130277452
- Publication date Oct 24, 2013
- Takayuki YABU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE
- Publication number 20130206863
- Publication date Aug 15, 2013
- GIGAPHOTON INC.
- Takayuki YABU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20130105713
- Publication date May 2, 2013
- GIGAPHOTON INC.
- Yukio Watanabe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20130075625
- Publication date Mar 28, 2013
- GIGAPHOTON INC.
- Takayuki YABU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MIRROR DEVICE
- Publication number 20130050862
- Publication date Feb 28, 2013
- GIGAPHOTON INC.
- Hiroshi Someya
- G02 - OPTICS
Information Patent Application
TEMPERATURE CONTROLLER FOR GAS LASER
- Publication number 20120267343
- Publication date Oct 25, 2012
- Gigaphoton Inc.
- Yukio WATANABE
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM
- Publication number 20120119118
- Publication date May 17, 2012
- GIGAPHOTON INC.
- Yukio WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20120104290
- Publication date May 3, 2012
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER APPARATUS AND METHOD OF MAINTAINING TARGET SUPPLY UNIT
- Publication number 20110310365
- Publication date Dec 22, 2011
- Takayuki YABU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20110309260
- Publication date Dec 22, 2011
- Toshihiro Nishisaka
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20100288937
- Publication date Nov 18, 2010
- Yukio WATANABE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TEMPERATURE CONTROLLER FOR GAS LASER
- Publication number 20100217444
- Publication date Aug 26, 2010
- Yukio Watanabe
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM
- Publication number 20100193711
- Publication date Aug 5, 2010
- Yukio WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Differential evacuation system
- Publication number 20100181498
- Publication date Jul 22, 2010
- Komatsu Ltd.
- Hiroshi Someya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Yukio WATANABE

Person

Patents Grantslast 30 patents

Extreme ultraviolet light generation apparatus and electronic devic...

Optical apparatus

Target supply device, target supply method, and electronic device m...

Optical element angle adjustment device and extreme ultraviolet lig...

Structure of connection between optical unit and optical path tube

Extreme ultraviolet light generation apparatus

Mirror device

Extreme ultraviolet light source apparatus

Extreme ultraviolet light source apparatus

Extreme ultraviolet light generation apparatus

Mirror device

Extreme ultraviolet light generation apparatus

Extreme ultraviolet light source apparatus

Extreme ultraviolet light source apparatus

Mirror device

Temperature controller for gas laser

Temperature controller for gas laser

Target supply device

Chamber apparatus and extreme ultraviolet light generation system

Extreme ultraviolet light generation system

Extreme ultraviolet light source apparatus

Chamber apparatus and method of maintaining target supply unit

Temperature controller for gas laser

Differential evacuation system

Temperature controller for gas laser

Semiconductor light-emitting element

Image processing unit, image processing system using the same, and...

Semiconductor light emitting element with improved light extraction...

Renaming apparatus and processor

Semiconductor light-emitting device and method of manufacturing the...

Patents Applicationslast 30 patents

EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND ELECTRONIC DEVIC...

TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...

OPTICAL APPARATUS

OPTICAL ELEMENT ANGLE ADJUSTMENT DEVICE AND EXTREME ULTRAVIOLET LIG...

STRUCTURE OF CONNECTION BETWEEN OPTICAL UNIT AND OPTICAL PATH TUBE

MIRROR DEVICE

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

MIRROR DEVICE

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

TEMPERATURE CONTROLLER FOR GAS LASER

TEMPERATURE CONTROLLER FOR GAS LASER

CHAMBER APPARATUS AND METHOD OF MAINTAINING TARGET SUPPLY UNIT

TARGET SUPPLY DEVICE

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

TARGET SUPPLY UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

MIRROR DEVICE

TEMPERATURE CONTROLLER FOR GAS LASER

EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

CHAMBER APPARATUS AND METHOD OF MAINTAINING TARGET SUPPLY UNIT

CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

TEMPERATURE CONTROLLER FOR GAS LASER

EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM

Differential evacuation system