Yukio Yamane

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and method of cleaning optical element of the same
- Patent number 7,119,878
- Issue date Oct 10, 2006
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and method of cleaning optical element of the same
- Patent number 7,061,576
- Issue date Jun 13, 2006
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and manufacturing method using the same
- Patent number 6,762,822
- Issue date Jul 13, 2004
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method using the same
- Patent number 6,590,631
- Issue date Jul 8, 2003
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,552,774
- Issue date Apr 22, 2003
- Canon Kabushiki Kaisha
- Tomoharu Hase
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 6,259,509
- Issue date Jul 10, 2001
- Canon Kabushiki Kaisha
- Yoshinori Miwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of cleaning optical element of the same
- Patent number 6,252,648
- Issue date Jun 26, 2001
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G02 - OPTICS
Information Patent Grant
Positioning system
- Patent number 6,151,100
- Issue date Nov 21, 2000
- Canon Kabushiki Kaisha
- Yukio Yamane
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system and method and apparatus for device manufacture
- Patent number 5,858,587
- Issue date Jan 12, 1999
- Canon Kabushiki Kaisha
- Yukio Yamane
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate transfer system
- Patent number 5,773,953
- Issue date Jun 30, 1998
- Canon Kabushiki Kaisha
- Takao Ukaji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting system
- Patent number 5,523,843
- Issue date Jun 4, 1996
- Canon Kabushiki Kaisha
- Yukio Yamane
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for exposure
- Patent number 5,440,397
- Issue date Aug 8, 1995
- Canon Kabushiki Kaisha
- Kazuya Ono
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Plate-like article holding device
- Patent number 4,869,481
- Issue date Sep 26, 1989
- Canon Kabushiki Kaisha
- Shuichi Yabu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus and method of cleaning optical element of the same
- Publication number 20060001853
- Publication date Jan 5, 2006
- Canon Kabushiki Kaisha
- Tomoharu Hase
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING THE SAME
- Publication number 20020145710
- Publication date Oct 10, 2002
- YOSHINORI MIWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus
- Publication number 20010030739
- Publication date Oct 18, 2001
- Tomoharu Hase
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Exposure apparatus and method of cleaning optical element of the same
- Publication number 20010028447
- Publication date Oct 11, 2001
- Tomoharu Hase
- G02 - OPTICS

Yukio Yamane

Person

Patents Grantslast 30 patents

Exposure apparatus and method of cleaning optical element of the same

Exposure apparatus and method of cleaning optical element of the same

Exposure apparatus and manufacturing method using the same

Exposure apparatus and device manufacturing method using the same

Exposure apparatus

Exposure apparatus and device manufacturing method

Exposure apparatus and method of cleaning optical element of the same

Positioning system

Positioning system and method and apparatus for device manufacture

Substrate transfer system

Position detecting system

Apparatus and method for exposure

Plate-like article holding device

Patents Applicationslast 30 patents

Exposure apparatus and method of cleaning optical element of the same

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD USING THE SAME

Exposure apparatus

Exposure apparatus and method of cleaning optical element of the same