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Noda, JP
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last 30 patents
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Patent Grant
Plasma processing equipment
Patent number
6,211,622
Issue date
Apr 3, 2001
Kawasaki Jukogyo Kabushiki Kaisha
Makoto Ryoji
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Electron-beam excited plasma generator with side orifices in the di...
Patent number
5,942,854
Issue date
Aug 24, 1999
Kawasaki Jukogyo Kabushiki Kaisha
Makoto Ryoji
H01 - BASIC ELECTRIC ELEMENTS