Yukitaka Shimizu

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Multi charged particle beam writing apparatus and adjusting method...
- Patent number 10,541,105
- Issue date Jan 21, 2020
- NuFlare Technology, Inc.
- Eita Fujisaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 10,504,696
- Issue date Dec 10, 2019
- NuFlare Technology, Inc.
- Osamu Iizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 10,497,539
- Issue date Dec 3, 2019
- NuFlare Technology, Inc.
- Osamu Iizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 10,483,088
- Issue date Nov 19, 2019
- NuFlare Technology, Inc.
- Osamu Iizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring resolution of charged particle beam and charge...
- Patent number 10,211,027
- Issue date Feb 19, 2019
- NuFlare Technology, Inc.
- Yukitaka Shimizu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi charged particle beam writing apparatus and method of adjusti...
- Patent number 10,157,723
- Issue date Dec 18, 2018
- NuFlare Technology, Inc.
- Tsubasa Nanao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND ADJUSTING METHOD...
- Publication number 20180247788
- Publication date Aug 30, 2018
- NuFlare Technology, Inc.
- Eita FUJISAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20180144905
- Publication date May 24, 2018
- NuFlare Technology, Inc.
- Osamu IIZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20180138012
- Publication date May 17, 2018
- NuFlare Technology, Inc.
- Osamu IIZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20180138013
- Publication date May 17, 2018
- NuFlare Technology, Inc.
- Osamu IIZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD OF ADJUSTI...
- Publication number 20180040453
- Publication date Feb 8, 2018
- NuFlare Technology, Inc.
- Tsubasa NANAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MEASURING RESOLUTION OF CHARGED PARTICLE BEAM AND CHARGE...
- Publication number 20180040456
- Publication date Feb 8, 2018
- NuFlare Technology, Inc.
- Yukitaka SHIMIZU
- G01 - MEASURING TESTING