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Yukiyoshi Saito

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  • Koshi City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate liquid processing apparatus
    • Patent number 10,290,518
    • Issue date May 14, 2019
    • Tokyo Electron Limited
    • Kento Kurusu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing system
    • Patent number 10,236,196
    • Issue date Mar 19, 2019
    • Tokyo Electron Limited
    • Yukiyoshi Saito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing system
    • Patent number 9,305,819
    • Issue date Apr 5, 2016
    • Tokyo Electron Limited
    • Yukiyoshi Saito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,443,513
    • Issue date May 21, 2013
    • Tokyo Electron Limited
    • Seiki Ishida
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents