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Yukiyoshi Saito

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  • Koshi City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate liquid processing apparatus
    • Patent number 10,290,518
    • Issue date May 14, 2019
    • Tokyo Electron Limited
    • Kento Kurusu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing system
    • Patent number 10,236,196
    • Issue date Mar 19, 2019
    • Tokyo Electron Limited
    • Yukiyoshi Saito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing system
    • Patent number 9,305,819
    • Issue date Apr 5, 2016
    • Tokyo Electron Limited
    • Yukiyoshi Saito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 8,443,513
    • Issue date May 21, 2013
    • Tokyo Electron Limited
    • Seiki Ishida
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
    • Publication number 20230282493
    • Publication date Sep 7, 2023
    • TOKYO ELECTRON LIMITED
    • Keita HIRASE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM
    • Publication number 20170309504
    • Publication date Oct 26, 2017
    • TOKYO ELECTRON LIMITED
    • Yukiyoshi Saito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE LIQUID PROCESSING APPARATUS
    • Publication number 20160064259
    • Publication date Mar 3, 2016
    • TOKYO ELECTRON LIMITED
    • Kento KURUSU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM
    • Publication number 20150132086
    • Publication date May 14, 2015
    • TOKYO ELECTRON LIMITED
    • Yukiyoshi Saito
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    SUBSTRATE PROCESSING SYSTEM
    • Publication number 20150132085
    • Publication date May 14, 2015
    • TOKYO ELECTRON LIMITED
    • Yukiyoshi Saito
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20110078898
    • Publication date Apr 7, 2011
    • TOKYO ELECTRON LIMITED
    • Seiki ISHIDA
    • H01 - BASIC ELECTRIC ELEMENTS