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Yuko Hanaoka
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Kodaira, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device carrying micro electro mechanical system
Patent number
8,581,354
Issue date
Nov 12, 2013
Hitachi, Ltd.
Tsukasa Fujimori
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated micro electro-mechanical system and manufacturing method...
Patent number
8,129,802
Issue date
Mar 6, 2012
Hitachi, Ltd.
Hiroshi Fukuda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing micro electro mechanical systems device
Patent number
7,972,886
Issue date
Jul 5, 2011
Hitachi, Ltd.
Heewon Jeong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Controlling stress in MEMS structures
Patent number
7,670,861
Issue date
Mar 2, 2010
Hitachi, Ltd.
Yuko Hanaoka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Inertial sensor and manufacturing method of the same
Patent number
7,658,109
Issue date
Feb 9, 2010
Hitachi, Ltd.
Hiroshi Fukuda
G01 - MEASURING TESTING
Information
Patent Grant
Integrated micro electro-mechanical system and manufacturing method...
Patent number
7,402,449
Issue date
Jul 22, 2008
Hitachi, Ltd.
Hiroshi Fukuda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor and sensor module
Patent number
7,325,457
Issue date
Feb 5, 2008
Hitachi, Ltd.
Tsukasa Fujimori
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Semiconductor device
Patent number
6,864,584
Issue date
Mar 8, 2005
Hitachi, Ltd.
Yuko Hanaoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for producing semiconductor integrated circuit device and s...
Patent number
6,784,038
Issue date
Aug 31, 2004
Renesas Technology Corp.
Yoshikazu Tanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming semiconductor integrated circuit device with dual...
Patent number
6,323,115
Issue date
Nov 27, 2001
Hitachi, Ltd.
Yoshikazu Tanabe
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Integrated micro electro-mechanical system and manufacturing method...
Publication number
20090064785
Publication date
Mar 12, 2009
Hitachi, Ltd.
Hiroshi Fukuda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Integrated micro electro-mechanical system and manufacturing method...
Publication number
20090049911
Publication date
Feb 26, 2009
Hitachi, Ltd.
Hiroshi Fukuda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING MICRO ELECTRO MECHANICAL SYSTEMS DEVICE
Publication number
20090017579
Publication date
Jan 15, 2009
Hitachi, Ltd.
Heewon JEONG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL SENSOR AND MANUFACTURING METHOD OF THE SAME
Publication number
20080196502
Publication date
Aug 21, 2008
Hiroshi FUKUDA
G01 - MEASURING TESTING
Information
Patent Application
SEMICONDUCTOR DEVICE CARRYING MICRO ELECTRO MECHANICAL SYSTEM
Publication number
20080128841
Publication date
Jun 5, 2008
Tsukasa Fujimori
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Manufacturing method of MEMS structures and manufacturing method of...
Publication number
20070249082
Publication date
Oct 25, 2007
Hitachi, Ltd.
Yuko Hanaoka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR PRODUCING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND S...
Publication number
20070184618
Publication date
Aug 9, 2007
Yoshikazu Tanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sensor and sensor module
Publication number
20070068266
Publication date
Mar 29, 2007
Tsukasa Fujimori
B60 - VEHICLES IN GENERAL
Information
Patent Application
Integrated micro electro-mechanical system and manufacturing method...
Publication number
20060205106
Publication date
Sep 14, 2006
Hiroshi Fukuda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Process for producing semiconductor integrated circuit device and s...
Publication number
20040259339
Publication date
Dec 23, 2004
Yoshikazu Tanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor device
Publication number
20030080433
Publication date
May 1, 2003
Yuko Hanaoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for producing semiconductor integrated circuit device and s...
Publication number
20020004263
Publication date
Jan 10, 2002
Yoshikazu Tanabe
H01 - BASIC ELECTRIC ELEMENTS