Yuko Iwabuchi

Person

Mito-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 8,604,430
- Issue date Dec 10, 2013
- Hitachi, Ltd.
- Yuko Iwabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of an inspection system using an electron beam
- Patent number 8,134,125
- Issue date Mar 13, 2012
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,439,506
- Issue date Oct 21, 2008
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,232,996
- Issue date Jun 19, 2007
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,012,252
- Issue date Mar 14, 2006
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,987,265
- Issue date Jan 17, 2006
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam emitting device
- Patent number 6,580,074
- Issue date Jun 17, 2003
- Hitachi, Ltd.
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 6,541,771
- Issue date Apr 1, 2003
- Hitachi, Ltd.
- Yuko Iwabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting patterns of a semiconductor dev...
- Patent number 6,512,227
- Issue date Jan 28, 2003
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,452,178
- Issue date Sep 17, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,348,690
- Issue date Feb 19, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope
- Patent number 6,225,628
- Issue date May 1, 2001
- Hitachi, Ltd.
- Yuko Iwabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and its analogous device
- Patent number 5,894,124
- Issue date Apr 13, 1999
- Hitachi, Ltd.
- Yuko Iwabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and its analogous device
- Patent number 5,668,372
- Issue date Sep 16, 1997
- Hitachi, Ltd.
- Yuko Iwabuchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...
- Publication number 20120132801
- Publication date May 31, 2012
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM
- Publication number 20090057556
- Publication date Mar 5, 2009
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20070215803
- Publication date Sep 20, 2007
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20060151699
- Publication date Jul 13, 2006
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20050205782
- Publication date Sep 22, 2005
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20020092986
- Publication date Jul 18, 2002
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting patterns of a semiconductor dev...
- Publication number 20020024021
- Publication date Feb 28, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20010030294
- Publication date Oct 18, 2001
- Hitachi, Ltd
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Application
Scanning electron microscope
- Publication number 20010002698
- Publication date Jun 7, 2001
- Yuko Iwabuchi
- H01 - BASIC ELECTRIC ELEMENTS

Yuko Iwabuchi

Person

Patents Grantslast 30 patents

Method and an apparatus of an inspection system using an electron beam

Method and apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Charged particle beam emitting device

Scanning electron microscope

Method and apparatus for inspecting patterns of a semiconductor dev...

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Scanning electron microscope

Scanning electron microscope and its analogous device

Scanning electron microscope and its analogous device

Patents Applicationslast 30 patents

METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...

METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for inspecting patterns of a semiconductor dev...

Method and an apparatus of an inspection system using an electron beam

Scanning electron microscope