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Yuko Kariya
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Hitachinaka, JP
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last 30 patents
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Patent Grant
Wafer inspection data handling and defect review tool
Patent number
8,209,135
Issue date
Jun 26, 2012
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
WAFER INSPECTION DATA HANDLING AND DEFECT REVIEW TOOL
Publication number
20110211060
Publication date
Sep 1, 2011
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G01 - MEASURING TESTING
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Patent Application
Wafer inspection data handling and defect review tool
Publication number
20070105245
Publication date
May 10, 2007
Hitachi High-Technologies Corporation
Tomohiro Funakoshi
G01 - MEASURING TESTING