Yuko Kitade

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus with dressing position setting means
- Patent number 8,412,370
- Issue date Apr 2, 2013
- Nikon Corporation
- Toshihisa Tanaka
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
POLISHING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE E...
- Publication number 20130183886
- Publication date Jul 18, 2013
- Nikon Corporation
- Toshihisa TANAKA
- B24 - GRINDING POLISHING
Information Patent Application
Polishing Apparatus, Method of Manufacturing Semiconductor Device E...
- Publication number 20100035520
- Publication date Feb 11, 2010
- Toshihisa Tanaka
- B24 - GRINDING POLISHING