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Yuko Nakamura
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Kawasaki, JP
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last 30 patents
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Patent Grant
Process for formation of resist patterns
Patent number
5,403,699
Issue date
Apr 4, 1995
Fujitsu Limited
Satoshi Takechi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist material for energy beam lithography and method of using the...
Patent number
5,104,479
Issue date
Apr 14, 1992
Fujitsu Limited
Akiko Kotachi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process for preparing of semiconductor device and pattern-forming c...
Patent number
5,087,551
Issue date
Feb 11, 1992
Fujitsu Limited
Yuko Nakamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process for production of semiconductor device
Patent number
5,068,169
Issue date
Nov 26, 1991
Fujitsu Limited
Satoshi Takechi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist material for energy beam lithography and method of using the...
Patent number
5,066,751
Issue date
Nov 19, 1991
Fujitsu Limited
Akiko Kotachi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process of using an electrically conductive layer-providing composi...
Patent number
5,019,485
Issue date
May 28, 1991
Fujitsu Limited
Yuko Nakamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY