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Yuko Ono
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Nirasaki-City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
8,353,986
Issue date
Jan 15, 2013
Tokyo Electron Limited
Yoshiaki Sasaski
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Developing method and developing unit
Patent number
8,053,180
Issue date
Nov 8, 2011
Tokyo Electron Limited
Yuko Ono
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Developing method and developing unit
Patent number
7,857,530
Issue date
Dec 28, 2010
Tokyo Electron Limited
Yuko Ono
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Developing method and developing unit
Patent number
7,794,924
Issue date
Sep 14, 2010
Tokyo Electron Limited
Yuko Ono
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Developing method and developing unit
Patent number
7,427,168
Issue date
Sep 23, 2008
Tokyo Electron Limited
Yuko Ono
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Developing method and developing unit
Patent number
6,955,485
Issue date
Oct 18, 2005
Tokyo Electron Limited
Yuko Ono
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Evaluating method of hydrophobic process, forming method of resist...
Patent number
6,617,095
Issue date
Sep 9, 2003
Tokyo Electron Limited
Junichi Kitano
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
DEVELOPING METHOD AND DEVELOPING UNIT
Publication number
20100047725
Publication date
Feb 25, 2010
TOKYO ELECTRON LIMITED
Yuko Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing method and developing unit
Publication number
20080284989
Publication date
Nov 20, 2008
TOKYO ELECTRON LIMITED
Yuko Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing method and developing unit
Publication number
20080079917
Publication date
Apr 3, 2008
TOKYO ELECTRON LIMITED
Yuko Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing method and developing unit
Publication number
20080013946
Publication date
Jan 17, 2008
TOKYO ELECTRON LIMITED
Yuko Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing apparatus
Publication number
20060219171
Publication date
Oct 5, 2006
TOKYO ELECTRON LIMITED
Yoshiaki Sasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Developing method and developing unit
Publication number
20050266359
Publication date
Dec 1, 2005
TOKYO ELECTRON LIMITED
Yuko Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Developing method and developing unit
Publication number
20030165756
Publication date
Sep 4, 2003
Yuko Ono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Evaluating method of hydrophobic process, forming method of resist...
Publication number
20020009592
Publication date
Jan 24, 2002
TOKYO ELECTRON LIMITED
Junichi Kitano
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC