Yuko SASAKI

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection apparatus adjustment system and inspection apparatus adj...
- Patent number 11,898,968
- Issue date Feb 13, 2024
- HITACHI HIGH-TECH CORPORATION
- Taichi Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam device
- Patent number 11,152,186
- Issue date Oct 19, 2021
- HITACHI HIGH-TECH CORPORATION
- Wataru Yamane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,991,542
- Issue date Apr 27, 2021
- HITACHI HIGH-TECH CORPORATION
- Ryota Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and capturing condition adjusting meth...
- Patent number 10,770,266
- Issue date Sep 8, 2020
- HITACHI HIGH-TECH CORPORATION
- Tomohito Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring device and measuring method
- Patent number 10,707,047
- Issue date Jul 7, 2020
- HITACHI HIGH-TECH CORPORATION
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement and inspection device
- Patent number 10,692,687
- Issue date Jun 23, 2020
- Hitachi High-Technologies Corporation
- Wen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and method for adjusting imaging co...
- Patent number 10,566,172
- Issue date Feb 18, 2020
- Hitachi High-Technologies Corporation
- Tomohito Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,319,558
- Issue date Jun 11, 2019
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle-beam device
- Patent number 9,960,006
- Issue date May 1, 2018
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,941,095
- Issue date Apr 10, 2018
- Hitachi High-Technologies Corporation
- Ryota Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device having an energy filter
- Patent number 9,318,299
- Issue date Apr 19, 2016
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 9,305,745
- Issue date Apr 5, 2016
- Hitachi High-Technologies Corporation
- Wataru Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 9,159,529
- Issue date Oct 13, 2015
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device having an energy filter
- Patent number 8,946,649
- Issue date Feb 3, 2015
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam scanning method and charged particle beam app...
- Patent number 8,338,781
- Issue date Dec 25, 2012
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,324,594
- Issue date Dec 4, 2012
- Hitachi High-Technologies Corporation
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,207,513
- Issue date Jun 26, 2012
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam orbit corrector and charged particle beam app...
- Patent number 7,947,964
- Issue date May 24, 2011
- Hitachi High-Technologies Corporation
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam scanning method and charged particle beam app...
- Patent number 7,935,925
- Issue date May 3, 2011
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam trajectory corrector and charged particle bea...
- Patent number 7,875,858
- Issue date Jan 25, 2011
- Hitachi High-Technologies Corporation
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corrector for charged-particle beam aberration and charged-particle...
- Patent number 7,872,240
- Issue date Jan 18, 2011
- Hitachi High-Technologies Corporation
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corrector for charged-particle beam aberration and charged-particle...
- Patent number 7,737,413
- Issue date Jun 15, 2010
- Hitachi High-Technologies Corporation
- Hiroyuki Ito
Information Patent Grant
Semiconductor wafer inspection tool and semiconductor wafer inspect...
- Patent number 7,728,294
- Issue date Jun 1, 2010
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,714,289
- Issue date May 11, 2010
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,435,960
- Issue date Oct 14, 2008
- Hitachi High-Technologies Corporation
- Makoto Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,425,702
- Issue date Sep 16, 2008
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a circuit pattern and inspecting instrument
- Patent number 7,397,031
- Issue date Jul 8, 2008
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,241,996
- Issue date Jul 10, 2007
- Hitachi High-Technologies Corporation
- Makoto Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inspecting a circuit pattern and inspecting instrument
- Patent number 7,098,455
- Issue date Aug 29, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a circuit pattern and inspecting instrument
- Patent number 6,583,413
- Issue date Jun 24, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20230377837
- Publication date Nov 23, 2023
- HITACHI HIGH-TECH CORPORATION
- Yohei NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20230162943
- Publication date May 25, 2023
- Hitachi High-Tech Corporation
- U OH
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220359149
- Publication date Nov 10, 2022
- HITACHI HIGH-TECH CORPORATION
- Makoto SAKAKIBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection Apparatus Adjustment System and Inspection Apparatus Adj...
- Publication number 20220252525
- Publication date Aug 11, 2022
- Hitachi High-Tech Corporation
- Taichi MAEDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged Particle Beam Device and Capturing Condition Adjusting Meth...
- Publication number 20200035449
- Publication date Jan 30, 2020
- Hitachi High-Technologies Corporation
- Tomohito NAKANO
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Device
- Publication number 20190362931
- Publication date Nov 28, 2019
- Hitachi High-Technologies Corporation
- Ryota WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT AND INSPECTION DEVICE
- Publication number 20190318906
- Publication date Oct 17, 2019
- Hitachi High-Technologies Corporation
- Wen LI
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Device
- Publication number 20190311875
- Publication date Oct 10, 2019
- Hitachi High-Technologies Corporation
- Wataru YAMANE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING DEVICE AND MEASURING METHOD
- Publication number 20190206654
- Publication date Jul 4, 2019
- Hitachi High-Technologies Corporation
- Noritsugu TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus and Method for Adjusting Imaging Co...
- Publication number 20190172676
- Publication date Jun 6, 2019
- Hitachi High-Technologies Corporation
- Tomohito NAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE-BEAM DEVICE
- Publication number 20170092459
- Publication date Mar 30, 2017
- Hitachi High-Technologies Corporation
- Noritsugu TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20160379795
- Publication date Dec 29, 2016
- Hitachi High-Technologies Corporation
- Ryota WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20160233049
- Publication date Aug 11, 2016
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20150102221
- Publication date Apr 16, 2015
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20150034824
- Publication date Feb 5, 2015
- Hitachi High-Technologies Corporation
- Wataru Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20150014531
- Publication date Jan 15, 2015
- Minoru Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20140124666
- Publication date May 8, 2014
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SCANNING METHOD AND CHARGED PARTICLE BEAM APP...
- Publication number 20110174975
- Publication date Jul 21, 2011
- Hitachi High-Technologies Corporation
- Yuko SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20100051806
- Publication date Mar 4, 2010
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20090218509
- Publication date Sep 3, 2009
- Hitachi High-Technologies Corporation
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM TRAJECTORY CORRECTOR AND CHARGED PARTICLE BEA...
- Publication number 20090173887
- Publication date Jul 9, 2009
- Hitachi High-Technologies Corporation
- Hiroyuki ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORRECTOR FOR CHARGED-PARTICLE BEAM ABERRATION AND CHARGED-PARTICLE...
- Publication number 20090032722
- Publication date Feb 5, 2009
- Hitachi High-Technologies Corporation
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20080272300
- Publication date Nov 6, 2008
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Orbit Corrector and Charged Particle Beam App...
- Publication number 20080116391
- Publication date May 22, 2008
- Hitachi High-Technologies Corporation
- Hiroyuki Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam scanning method and charged particle beam app...
- Publication number 20080073528
- Publication date Mar 27, 2008
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor wafer inspection tool and semiconductor wafer inspect...
- Publication number 20080067381
- Publication date Mar 20, 2008
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20070241278
- Publication date Oct 18, 2007
- Makoto Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of inspecting a circuit pattern and inspecting instrument
- Publication number 20060243908
- Publication date Nov 2, 2006
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20060151698
- Publication date Jul 13, 2006
- Hitachi High-Technologies Corporation
- Yuko Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20060016990
- Publication date Jan 26, 2006
- Makoto Suzuki
- H01 - BASIC ELECTRIC ELEMENTS

Yuko SASAKI

Person

Patents Grantslast 30 patents

Inspection apparatus adjustment system and inspection apparatus adj...

Charged particle beam device

Charged particle beam device

Charged particle beam device and capturing condition adjusting meth...

Measuring device and measuring method

Measurement and inspection device

Charged particle beam apparatus and method for adjusting imaging co...

Charged particle beam device

Charged-particle-beam device

Charged particle beam apparatus

Charged particle beam device having an energy filter

Scanning electron microscope

Scanning electron microscope

Charged particle beam device having an energy filter

Charged particle beam scanning method and charged particle beam app...

Charged particle beam apparatus

Charged particle beam apparatus

Charged particle beam orbit corrector and charged particle beam app...

Charged particle beam scanning method and charged particle beam app...

Charged particle beam trajectory corrector and charged particle bea...

Corrector for charged-particle beam aberration and charged-particle...

Corrector for charged-particle beam aberration and charged-particle...

Semiconductor wafer inspection tool and semiconductor wafer inspect...

Charged particle beam apparatus

Charged particle beam apparatus

Charged particle beam apparatus

Method of inspecting a circuit pattern and inspecting instrument

Charged particle beam apparatus

Method of inspecting a circuit pattern and inspecting instrument

Method of inspecting a circuit pattern and inspecting instrument

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM DEVICE

Inspection Apparatus Adjustment System and Inspection Apparatus Adj...

Charged Particle Beam Device and Capturing Condition Adjusting Meth...

Charged Particle Beam Device

MEASUREMENT AND INSPECTION DEVICE

Charged Particle Beam Device

MEASURING DEVICE AND MEASURING METHOD

Charged Particle Beam Apparatus and Method for Adjusting Imaging Co...

CHARGED-PARTICLE-BEAM DEVICE

Charged Particle Beam Apparatus

Charged Particle Beam Device

Charged Particle Beam Device

SCANNING ELECTRON MICROSCOPE

SCANNING ELECTRON MICROSCOPE

Charged Particle Beam Device

CHARGED PARTICLE BEAM SCANNING METHOD AND CHARGED PARTICLE BEAM APP...

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM TRAJECTORY CORRECTOR AND CHARGED PARTICLE BEA...

CORRECTOR FOR CHARGED-PARTICLE BEAM ABERRATION AND CHARGED-PARTICLE...

Charged particle beam apparatus

Charged Particle Beam Orbit Corrector and Charged Particle Beam App...

Charged particle beam scanning method and charged particle beam app...

Semiconductor wafer inspection tool and semiconductor wafer inspect...

Charged particle beam apparatus

Method of inspecting a circuit pattern and inspecting instrument

Charged particle beam apparatus

Charged particle beam apparatus