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Yuli Vladimirsky
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Chappaqua, NY, US
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last 30 patents
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Patent Grant
Segmented mask and exposure system for x-ray lithography
Patent number
5,235,626
Issue date
Aug 10, 1993
International Business Machines Corporation
Alexander L. Flamholz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
X-ray metrology and alignment detection system
Patent number
5,168,513
Issue date
Dec 1, 1992
International Business Machines Corporation
Juan R. Maldonado
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY