Yuli Vladmirsky

Follow

Person

Weston, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Speckle reduction method and system for EUV interferometry
- Patent number 7,027,164
- Issue date Apr 11, 2006
- ASML Holding N.V.
- Richard A. Gontin
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Speckle reduction method and system for EUV interferometry
- Publication number 20040136070
- Publication date Jul 15, 2004
- ASML Holding N.V.
- Richard A. Gontin
- G02 - OPTICS