Yulu Chen

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Troy, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet (EUV) lithography mask
- Patent number 10,802,393
- Issue date Oct 13, 2020
- GLOBALFOUNDRIES Inc.
- Lei Sun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for analyzing printed masks for lithography based...
- Patent number 10,564,554
- Issue date Feb 18, 2020
- GLOBALFOUNDRIES Inc.
- Liang Cao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Extreme ultraviolet mirrors and masks with improved reflectivity
- Patent number 10,468,149
- Issue date Nov 5, 2019
- GLOBALFOUNDRIES Inc.
- Yulu Chen
- G02 - OPTICS
Information Patent Grant
Dummy assist features for pattern support
- Patent number 10,332,745
- Issue date Jun 25, 2019
- GLOBALFOUNDRIES Inc.
- Lei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sidewall spacer pattern formation method
- Patent number 9,911,604
- Issue date Mar 6, 2018
- GLOBALFOUNDRIES Inc.
- Lei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing self-aligned vias
- Patent number 9,484,258
- Issue date Nov 1, 2016
- GLOBALFOUNDRIES INC.
- Ryan Ryoung-han Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SAV using selective SAQP/SADP
- Patent number 9,478,462
- Issue date Oct 25, 2016
- GLOBALFOUNDRIES Inc.
- Wenhui Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PHOTOLITHOGRAPHY SYSTEM AND METHOD INCORPORATING A PHOTOMASK-PELLIC...
- Publication number 20190258157
- Publication date Aug 22, 2019
- GLOBALFOUNDRIES INC.
- Yulu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR ANALYZING PRINTED MASKS FOR LITHOGRAPHY BASED...
- Publication number 20190219933
- Publication date Jul 18, 2019
- GLOBALFOUNDRIES INC.
- Liang Cao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY MASK
- Publication number 20190113836
- Publication date Apr 18, 2019
- GLOBALFOUNDRIES INC.
- Lei SUN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV PATTERNING USING PHOTOMASK SUBSTRATE TOPOGRAPHY
- Publication number 20190056651
- Publication date Feb 21, 2019
- GLOBALFOUNDRIES INC.
- Erik Verduijn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DUMMY ASSIST FEATURES FOR PATTERN SUPPORT
- Publication number 20180337045
- Publication date Nov 22, 2018
- GLOBALFOUNDRIES INC.
- Lei Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET MIRRORS AND MASKS WITH IMPROVED REFLECTIVITY
- Publication number 20180226166
- Publication date Aug 9, 2018
- GLOBALFOUNDRIES INC.
- Yulu Chen
- G02 - OPTICS