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Toyama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and precursor gas nozzle
Patent number
11,020,760
Issue date
Jun 1, 2021
Kokusai Electric Corporation
Toshiki Fujino
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Gas supply nozzle
Patent number
D828091
Issue date
Sep 11, 2018
Hitachi Kokusai Electric, Inc.
Toshiki Fujino
D07 - Equipment for preparing or serving food or drink not elsewhere specified
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND PRECURSOR GAS NOZZLE
Publication number
20170232457
Publication date
Aug 17, 2017
Hitachi Kokusai Electric Inc.
Toshiki FUJINO
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...