Yuma Ohkura

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San Mateo, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Laminated heater with different heater trace materials
- Patent number 10,764,966
- Issue date Sep 1, 2020
- Lam Research Corporation
- Yuma Ohkura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Connections between laminated heater and heater voltage inputs
- Patent number 10,667,379
- Issue date May 26, 2020
- Lam Research Corporation
- Yuma Ohkura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS
- Publication number 20230369026
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOATING PCB DESIGN FOR SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20230178407
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Siyuan Tian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CHUCK WITH THERMAL TUNING CAVITY FEATURES
- Publication number 20230079804
- Publication date Mar 16, 2023
- LAM RESEARCH CORPORATION
- Siyuan Tian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF IMMUNE SENSOR PROBE FOR MONITORING A TEMPERATURE OF AN ELECTROST...
- Publication number 20220238360
- Publication date Jul 28, 2022
- LAM RESEARCH CORPORATION
- Siyuan TIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAMINATED HEATER WITH DIFFERENT HEATER TRACE MATERIALS
- Publication number 20170332480
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Yuma Ohkura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONNECTIONS BETWEEN LAMINATED HEATER AND HEATER VOLTAGE INPUTS
- Publication number 20170332481
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Yuma Ohkura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR