Yumi Nakagawa

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Surface inspection apparatus and method
- Patent number 6,313,913
- Issue date Nov 6, 2001
- Nikon Corporation
- Yumi Nakagawa
- G01 - MEASURING TESTING
Information Patent Grant
Foreign substance inspecting apparatus and method thereof
- Patent number 5,856,868
- Issue date Jan 5, 1999
- Nikon Corporation
- Kinya Kato
- G01 - MEASURING TESTING