Yumi Shibata

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Resist material for micro-fabrication
- Patent number 4,349,647
- Issue date Sep 14, 1982
- Somar Manufacturing Co., Ltd.
- Kohtaro Nagasawa
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
High energy radiation curable resist material and method of using t...
- Patent number 4,299,911
- Issue date Nov 10, 1981
- Somar Manufacturing Co., Ltd.
- Hideo Ochi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Resist material for micro-fabrication with unsaturated dicarboxylic...
- Patent number 4,273,858
- Issue date Jun 16, 1981
- Somar Manufacturing Co., Ltd.
- Kohtaro Nagasawa
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...