Yumiko Miyano

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Alignment of semiconductor wafer patterns by corresponding edge groups
- Patent number 8,126,257
- Issue date Feb 28, 2012
- Kabushiki Kaisha Toshiba
- Yumiko Miyano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern shape evaluation apparatus, pattern shape evaluation method...
- Patent number 7,787,687
- Issue date Aug 31, 2010
- Kabushiki Kaisha Toshiba
- Yumiko Miyano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Micropattern measuring method, micropattern measuring apparatus, an...
- Patent number 7,418,363
- Issue date Aug 26, 2008
- Kabushiki Kaisha Toshiba
- Takahiro Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Graphic contour extracting method, pattern inspecting method, progr...
- Patent number 7,321,680
- Issue date Jan 22, 2008
- Kabushiki Kaisha Toshiba
- Takahiro Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Micropattern measuring method, micropattern measuring apparatus, an...
- Patent number 6,963,819
- Issue date Nov 8, 2005
- Kabushiki Kaisha Toshiba
- Takahiro Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Graphic contour extracting method, pattern inspecting method, progr...
- Patent number 6,772,089
- Issue date Aug 3, 2004
- Kabushiki Kaisha Toshiba
- Takahiro Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring fine pattern, apparatus for measuring fine pat...
- Patent number 6,647,147
- Issue date Nov 11, 2003
- Kabushiki Kaisha Toshiba
- Yumiko Miyano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Micropattern measuring method and apparatus, and recording medium t...
- Patent number 6,480,807
- Issue date Nov 12, 2002
- Kabushiki Kaisha Toshiba
- Yumiko Miyano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring size of fine pattern
- Patent number 6,363,167
- Issue date Mar 26, 2002
- Kabushiki Kaisha Toshiba
- Yumiko Miyano
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Storage Medium Storing Simulation Program, Simulation Device, and S...
- Publication number 20160063138
- Publication date Mar 3, 2016
- Kabushiki Kaisha Toshiba
- Yumiko MIYANO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern shape evaluation apparatus, pattern shape evaluation method...
- Publication number 20070280541
- Publication date Dec 6, 2007
- Yumiko Miyano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern shape evaluation apparatus, pattern shape evaluation method...
- Publication number 20070098249
- Publication date May 3, 2007
- Yumiko Miyano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Micropattern measuring method, micropattern measuring apparatus, an...
- Publication number 20050278138
- Publication date Dec 15, 2005
- Kabushiki Kaisha Toshiba
- Takahiro Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Graphic contour extracting method, pattern inspecting method, progr...
- Publication number 20040181361
- Publication date Sep 16, 2004
- Kabushiki Kaisha Toshiba
- Takahiro Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Micropattern measuring method, micropattern measuring apparatus, an...
- Publication number 20040131246
- Publication date Jul 8, 2004
- Takahiro Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Graphic contour extracting method, pattern inspecting method, progr...
- Publication number 20030074156
- Publication date Apr 17, 2003
- Takahiro Ikeda
- G06 - COMPUTING CALCULATING COUNTING

Yumiko Miyano

Person

Patents Grantslast 30 patents

Alignment of semiconductor wafer patterns by corresponding edge groups

Pattern shape evaluation apparatus, pattern shape evaluation method...

Micropattern measuring method, micropattern measuring apparatus, an...

Graphic contour extracting method, pattern inspecting method, progr...

Micropattern measuring method, micropattern measuring apparatus, an...

Graphic contour extracting method, pattern inspecting method, progr...

Method for measuring fine pattern, apparatus for measuring fine pat...

Micropattern measuring method and apparatus, and recording medium t...

Method for measuring size of fine pattern

Patents Applicationslast 30 patents

Storage Medium Storing Simulation Program, Simulation Device, and S...

Pattern shape evaluation apparatus, pattern shape evaluation method...

Pattern shape evaluation apparatus, pattern shape evaluation method...

Micropattern measuring method, micropattern measuring apparatus, an...

Graphic contour extracting method, pattern inspecting method, progr...

Micropattern measuring method, micropattern measuring apparatus, an...

Graphic contour extracting method, pattern inspecting method, progr...