Yumiko NAKAMURA

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for determining a cleanliness of a cleaning member
- Patent number 12,101,073
- Issue date Sep 24, 2024
- Ebara Corporation
- Chikako Takatoh
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SiC WAFER AND SiC EPITAXIAL WAFER
- Publication number 20240213329
- Publication date Jun 27, 2024
- Resonac Corporation
- Yumiko NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS FOR CLEANING MEMBER, CLEANING METHOD FOR CLEANIN...
- Publication number 20240050991
- Publication date Feb 15, 2024
- EBARA CORPORATION
- Megumi UNO
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR CLEANING WASHING TOOL, SUBSTRATE WASHING D...
- Publication number 20240024928
- Publication date Jan 25, 2024
- EBARA CORPORATION
- Megumi UNO
- B08 - CLEANING
Information Patent Application
MACHINE LEARNING APPARATUS, SLIDING-SURFACE DIAGNOSIS APPARATUS, IN...
- Publication number 20240011821
- Publication date Jan 11, 2024
- EBARA CORPORATION
- Chikako TAKATOH
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETERMINING CLEANLINESS OF CLEANING MEMBER, METHOD FOR D...
- Publication number 20210384881
- Publication date Dec 9, 2021
- EBARA CORPORATION
- Chikako Takatoh
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHOD AND APPARATUS FOR JUDGING POLISHING PERFORMANCE OF POLISHING...
- Publication number 20150346088
- Publication date Dec 3, 2015
- EBARA CORPORATION
- Chikako TAKATOH
- G01 - MEASURING TESTING